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S. Rauf · SciRah

Researcher profile · Semantic Scholar

S. Rauf

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S. Rauf — researcher profile on SciRah

h-index: 32
Works: 238
Citations: 4,595

Most-cited papers

The 2017 Plasma Roadmap: Low temperature plasma science and technology
I. Adamovich, S. Baalrud, A. Bogaerts, P. Bruggeman +34 more
2017794 citations Open access
Semantic Scholar
The 2012 Plasma Roadmap
S. Samukawa, M. Hori, S. Rauf, K. Tachibana +12 more
2012620 citations Open access
Semantic Scholar
Future of plasma etching for microelectronics: Challenges and opportunities
G. Oehrlein, Stephan M. Brandstadter, Robert L. Bruce, Jane P. Chang +31 more
2024Journal of Vacuum Science & Technology B170 citations Open access
Semantic Scholar
QDB: a new database of plasma chemistries and reactions
J. Tennyson, S. Rahimi, Christian Hill, Lisa Tse +30 more
201754 citations Open access
Semantic Scholar
Gas heating mechanisms in capacitively coupled plasmas
A. Agarwal, S. Rauf, K. Collins
201236 citations
Semantic Scholar
On uniformity and non-local transport in low pressure capacitively coupled plasmas
S. Rauf
2020Plasma Sources Science & Technology35 citations Open access
Semantic Scholar
Science challenges and research opportunities for plasma applications in microelectronics
D. B. Graves, C. Labelle, M. Kushner, E. Aydil +7 more
2024Journal of Vacuum Science & Technology B33 citations
Semantic Scholar
Triangular loop resonator based compact chipless RFID tag
S. Rauf, M. A. Riaz, H. Shahid, Muhammad Sohail Iqbal +2 more
2017IEICE Electronics Express33 citations Open access
Semantic Scholar
Extraction of negative ions from pulsed electronegative capacitively coupled plasmas
A. Agarwal, S. Rauf, K. Collins
201232 citations
Semantic Scholar
Etching with atomic precision by using low electron temperature plasma
L. Dorf, J.-C. Wang, S. Rauf, G. Monroy +5 more
201729 citations Open access
Semantic Scholar
Three-dimensional model of electron beam generated plasma
S. Rauf, Ajit Balakrishna, A. Agarwal, L. Dorf +3 more
201727 citations
Semantic Scholar
Recouping etch rates in pulsed inductively coupled plasmas
A. Agarwal, P. Stout, S. Banna, S. Rauf +1 more
201126 citations
Semantic Scholar
The 2021 release of the Quantemol database (QDB) of plasma chemistries and reactions
J. Tennyson, S. Mohr, Martin Hanicinec, Anna Dzarasova +16 more
2022Plasma Sources Science & Technology22 citations Open access
Semantic Scholar
Ion energy distribution functions in a dual-frequency low-pressure capacitively-coupled plasma: experiments and particle-in-cell simulation
Jun-Chieh Wang, Peng Tian, J. Kenney, S. Rauf +2 more
2021Plasma Sources Science & Technology22 citations
Semantic Scholar
Numerical thermalization in 2D PIC simulations: Practical estimates for low-temperature plasma simulations
Sierra Jubin, A. Powis, W. Villafana, D. Sydorenko +4 more
2024Physics of Plasmas20 citations Open access
Semantic Scholar
SiO2 etching in an Ar/c-C4F8/O2 dual frequency capacitively coupled plasma
S. Rauf, Ajit Balakrishna
201719 citations
Semantic Scholar
FSS inspired polarization insensitive chipless RFID tag
Muhammad Sohail Iqbal, H. Shahid, M. A. Riaz, S. Rauf +2 more
2017IEICE Electronics Express19 citations Open access
Semantic Scholar
Decreasing high ion energy during transition in pulsed inductively coupled plasmas
A. Agarwal, P. Stout, S. Banna, S. Rauf +1 more
201218 citations
Semantic Scholar
Effect of low frequency voltage waveform on plasma uniformity in a dual-frequency capacitively coupled plasma
S. Rauf, Peng Tian, J. Kenney, L. Dorf
2022Journal of Vacuum Science & Technology B17 citations
Semantic Scholar
Effects of macroparticle weighting in axisymmetric particle-in-cell Monte Carlo collision simulations
K. Hara, Timothy Robertson, J. Kenney, S. Rauf
2023Plasma Sources Science & Technology16 citations Open access
Semantic Scholar
Particle-in-cell modeling of electron beam generated plasma
S. Rauf, D. Sydorenko, Sierra Jubin, W. Villafana +3 more
2023Plasma Sources Science & Technology16 citations Open access
Semantic Scholar
Calculated cross sections for electron collisions with NF 3 , NF 2 and NF with applications to remote plasma sources
Jonathan Tennyson, S. Rahimi, Christian Hill, L. Tse +30 more
201716 citations
Semantic Scholar
Modeling of low pressure plasma sources for microelectronics fabrication
A. Agarwal, K. Bera, J. Kenney, A. Likhanskii +1 more
201716 citations Open access
Semantic Scholar
Metastable argon atom kinetics in a low-pressure capacitively coupled radio frequency discharge
Z. Donkó, P. Hartmann, I. Korolov, D. Schulenberg +3 more
2023Plasma Sources Science & Technology12 citations Open access
Semantic Scholar
Self-organized pattern formation in radio frequency capacitively coupled discharges
K. Bera, S. Rauf, J. Forster, K. Collins
202112 citations
Semantic Scholar
On the scaling of rf and dc self-bias voltages with pressure in electronegative capacitively coupled plasmas
A. Agarwal, L. Dorf, S. Rauf, K. Collins
201212 citations
Semantic Scholar
Investigating instabilities in magnetized low-pressure capacitively coupled RF plasma using particle-in-cell (PIC) simulations
S. Ganta, Kallol Bera, S. Rauf, I. Kaganovich +4 more
2024Physics of Plasmas11 citations Open access
Semantic Scholar
Atomic precision etch using a low-electron temperature plasma
L. Dorf, J.-C. Wang, S. Rauf, Y. Zhang +4 more
2016SPIE Advanced Lithography11 citations
Semantic Scholar
A model for etching of three-dimensional high aspect ratio silicon structures in pulsed inductively coupled plasmas
J.-C. Wang, W. Tian, S. Rauf, S. Sadighi +10 more
2018Plasma Sources Science & Technology10 citations
Semantic Scholar
Modeling of plasma processing reactors: review and perspective
S. Rauf, K. Bera, J. Kenney, P. Kothnur
2023Journal of Micro/Nanopatterning, Materials, and Metrology9 citations
Semantic Scholar
Plasma dynamics in a capacitively coupled discharge driven by a combination of a single high frequency and a tailored low frequency rectangular voltage waveform
S. Rauf, M. Schroeder, I. Korolov, J. Kenney +1 more
2023Plasma Sources Science & Technology8 citations Open access
Semantic Scholar
Numerical and experimental study of ion energy distribution function in a dual-frequency capacitively coupled oxygen discharge
Han Luo, J. Kenney, S. Rauf, I. Korolov +1 more
2023Plasma Sources Science & Technology7 citations Open access
Semantic Scholar
Interaction of electromagnetic waves with low-temperature plasmas
O. Sakai, S. Rauf
20147 citations Open access
Semantic Scholar
Uniformity of low-pressure capacitively coupled plasmas: Experiments and two-dimensional particle-in-cell simulations
Peng Tian, J. Kenney, S. Rauf, I. Korolov +1 more
2024Physics of Plasmas6 citations Open access
Semantic Scholar
Rotating spokes, potential hump and modulated ionization in radio frequency magnetron discharges
Liang Xu, Hao-Min Sun, D. Eremin, S. Ganta +4 more
2023Plasma Sources Science & Technology6 citations Open access
Semantic Scholar
Power measurement analysis of moderate pressure capacitively coupled discharges
S. Hussain, Abhishek Verma, K. Bera, S. Rauf +1 more
2024Journal of Vacuum Science & Technology A5 citations
Semantic Scholar
A call for mentoring of medical students in the backdrop of integrated curriculum.
Naushaba Sadiq, Wajeeha Aurangzeb, Ayesha Farooq, S. Rauf +1 more
2013Journal of Ayub Medical College5 citations
Semantic Scholar
Model for a transformer-coupled toroidal plasma source
S. Rauf, Ajit Balakrishna, Zhi-Gang Chen, K. Collins
20125 citations
Semantic Scholar
Novel Digital Twin Deployment Approaches: Local and Distributed Digital Twin
S. Rauf, Fazal Muhammad, Akhtar Badshah, Hisham Alasmary +2 more
2025IEEE Access4 citations Open access
Semantic Scholar
Ar/CF4 capacitively coupled plasma generated using 40 MHz sinusoidal and 800 kHz rectangular waveform voltages
S. Rauf, S. Ganta, Xingyi Shi, Kallol Bera +1 more
2024Plasma Sources Science & Technology4 citations
Semantic Scholar
Radiofrequency phase resolved electron density measurements with the hairpin resonator probe
D. Peterson, K. Ford, J. Brandon, S. Shannon +6 more
2020Journal of Physics D: Applied Physics4 citations
Semantic Scholar
Fully Self-Consistent 3-D Modeling of Inductively Coupled Plasmas
A. Agarwal, J. Kenney, S. Rauf, K. Collins
2014IEEE Transactions on Plasma Science4 citations
Semantic Scholar
Extending Fourier Neural Operators for Modeling Parameterized and Coupled PDEs
Cheng Jing, Uvini Balasuriya Mudiyanselage, Abhishek Verma, Kallol Bera +2 more
2026arXiv.org3 citations
Semantic Scholar
On the use of pulsed DC bias for etching high aspect ratio features
Xingyi Shi, S. Sadighi, S. Rauf, Han Luo +6 more
2024Journal of Vacuum Science & Technology A3 citations Open access
Semantic Scholar
ENHANCEMENT OF COLOR OF PLATY FISH (Xipophorus maculates) BY USING CARROT PEELS AS SOURCE OF CAROTENOIDS
S. Rauf, Muhammad Faisal Khalil, Nauman Khan, Kifayat Ullah +5 more
2024Journal of Survey in Fisheries Sciences3 citations Open access
Semantic Scholar
A neural-network-based model of radio-frequency hollow cathode discharge characterized using particle-in-cell/Monte Carlo collision simulation
K. Bera, Abhishek Verma, S. Ganta, S. Rauf
2024Journal of Physics D: Applied Physics3 citations
Semantic Scholar
Case study in machine learning for predicting moderate pressure plasma behavior
S. Hussain, D. Lary, K. Hara, K. Bera +2 more
2024Journal of Vacuum Science & Technology A3 citations
Semantic Scholar
Ion–ion oscillation and periodic emission pattern in electronegative capacitively coupled radio frequency plasmas
Tianhong Wang, S. Rauf, Niklas Friedrichs, I. Korolov +2 more
2026Physics of Plasmas2 citations Open access
Semantic Scholar
Modeling of hot cathode DC magnetized plasma source
A. Likhanskii, A. Perel, John Koo, J. Scheuer +1 more
20192 citations
Semantic Scholar
Model of a radio-frequency low electron temperature plasma source
S. Rauf, L. Dorf, K. Collins
2018Plasma Sources Science & Technology2 citations Open access
Semantic Scholar

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