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Stephan M. Brandstadter · SciRah

Researcher profile · Semantic Scholar

Stephan M. Brandstadter

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Stephan M. Brandstadter — researcher profile on SciRah

h-index: 1
Works: 1
Citations: 167

Most-cited papers

Future of plasma etching for microelectronics: Challenges and opportunities
G. Oehrlein, Stephan M. Brandstadter, Robert L. Bruce, Jane P. Chang +31 more
2024Journal of Vacuum Science & Technology B170 citations Open access
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