Calculated cross sections for electron collisions with NF 3 , NF 2 and NF with applications to remote plasma sources
Jonathan Tennyson, S. Rahimi, Christian Hill, L. Tse +30 more
201716 citations
Semantic Scholar
Researcher profile · Semantic Scholar
Jonathan Tennyson, S. Rahimi, Christian Hill, L. Tse +30 more
Mi-Young Song, Hyuck Cho, G. Karwasz, V. Kokoouline +2 more
Z. Mašín, J. Benda, Martin Crhan, Gregory S. J. Armstrong +3 more
Alejandro L. García-Muñoz, N. Sisourat, Z. Mašín, Oliver Bramley +3 more
Hyun-Kyung Chung, K. Bartschat, Jonathan Tennyson, D. R. Schulz