Calculated cross sections for electron collisions with NF 3 , NF 2 and NF with applications to remote plasma sources
Jonathan Tennyson, S. Rahimi, Christian Hill, L. Tse +30 more
201716 citations
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Jonathan Tennyson, S. Rahimi, Christian Hill, L. Tse +30 more
J. Hao, Z. Liu, B. Hu, L. Tse +8 more
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