Low-temperature etching of silicon oxide and silicon nitride with hydrogen fluoride
T. Lill, Ming-Mei Wang, Dongjun Wu, Youn-Jin Oh +7 more
Researcher profile · Semantic Scholar
T. Lill, Ming-Mei Wang, Dongjun Wu, Youn-Jin Oh +7 more
D. Sydorenko, I. Kaganovich, P. Ventzek, Lee Chen
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I. Kaganovich, Michael Tendler
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D. Eremin, A. Powis, I. Kaganovich
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I. Kaganovich, Y. Raitses, A. Khrabrov, V. Demidov +1 more
L. Hoffenberg, A. Khrabry, Y. Barsukov, I. Kaganovich +1 more
Pierre-Yves C. R. Taunay, W. Villafana, S. Vinoth, I. Kaganovich +1 more
D. Sydorenko, I. Kaganovich, A. Khrabrov, S. Ethier +2 more
I. Kaganovich, D. Sydorenko, E. Tokluoglu, E. Startsev +6 more
Sarveshwar Sharma, I. Kaganovich, A. Kuley, S. Sengupta +2 more
Y. Polyachenko, Y. Barsukov, S. Khalid, I. Kaganovich
S. Rauf, Tianhong Wang, J. Kenney, D. Sydorenko +1 more
Kenji Ishikawa, Thi-Thuy-Nga Nguyen, Kenichi Inoue, A. Osonio +8 more
K. Lezhnin, V. Ospina-Boh'orquez, J. Griff-McMahon, K. Bhutwala +5 more
M. Chamieh, A. Bansal, W. Villafana, D. Sydorenko +2 more
Hao-Min Sun, Jian Chen, A. Khrabrov, I. Kaganovich +3 more
Hao-Min Sun, Jian Chen, A. Khrabrov, I. Kaganovich +3 more
A. Bansal, W. Villafana, D. Sydorenko, I. Kaganovich +1 more
Q. Cao, H. Sun, J. Chen, I. Kaganovich +3 more
Hao-Min Sun, Soham Banerjee, Sarvesh Sharma, A. Powis +4 more
S. Selezneva, D. Smith, W. Villafana, A. Khrabrov +2 more
A. Verma, S. Rauf, K. Bera, D. Sydorenko +2 more
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A. Mustafaev, I. Kaganovich, Y. Raitses, V. Demidov +2 more
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