Frequency optimization for capacitively coupled plasma source
Kallol Bera, Daniel J. Hoffman, S. Shannon, G. Delgadino +1 more
2005IEEE Transactions on Plasma Science15 citations
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Kallol Bera, Daniel J. Hoffman, S. Shannon, G. Delgadino +1 more
O. Versolato, I. Kaganovich, Kallol Bera, T. Lill +4 more
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Kallol Bera, S. Ganta, S. Rauf