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Han Luo · SciRah

Researcher profile · Semantic Scholar

Han Luo

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Han Luo — researcher profile on SciRah

h-index: 2
Works: 3
Citations: 11

Most-cited papers

Numerical and experimental study of ion energy distribution function in a dual-frequency capacitively coupled oxygen discharge
Han Luo, J. Kenney, S. Rauf, I. Korolov +1 more
2023Plasma Sources Science & Technology7 citations Open access
Semantic Scholar
On the use of pulsed DC bias for etching high aspect ratio features
Xingyi Shi, S. Sadighi, S. Rauf, Han Luo +6 more
2024Journal of Vacuum Science & Technology A3 citations Open access
Semantic Scholar
Effect of mask geometry on high aspect ratio silicon etching using Cl2/O2 plasma
Xingyi Shi, Han Luo, S. Rauf, J. Kenney +3 more
2025Journal of Vacuum Science & Technology A1 citations
Semantic Scholar

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J. Kenney — researcher profile on SciRah
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