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Yuansheng Ma · SciRah

Researcher profile · Semantic Scholar

Yuansheng Ma

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Yuansheng Ma — researcher profile on SciRah

h-index: 20
Works: 53
Citations: 1,606

Most-cited papers

Facile preparation of N-doped activated carbon produced from rice husk for CO2 capture.
Song He, Guanyu Chen, Huan-Xin Xiao, Gui-Bin Shi +6 more
2020Journal of Colloid and Interface Science327 citations
Semantic Scholar
In-situ immobilization of ZIF-67 on wood aerogel for effective removal of tetracycline from water
Guanyu Chen, Song He, Gui-Bin Shi, Yuansheng Ma +7 more
2021270 citations
Semantic Scholar
Resist line edge roughness and aerial image contrast
Jangho Shin, G. Han, Yuansheng Ma, K. Moloni +1 more
200194 citations
Semantic Scholar
N-doped activated carbon for high-efficiency ofloxacin adsorption
Song He, Qi-Lin Chen, Guanyu Chen, Gui-Bin Shi +9 more
2022Microporous and Mesoporous Materials70 citations
Semantic Scholar
Crayfish shell-based micro-mesoporous activated carbon: Insight into preparation and gaseous benzene adsorption mechanism
Gui-Bin Shi, Song He, Guanyu Chen, Chichi Ruan +8 more
67 citations
Semantic Scholar
Insight to hydrophobic SiO2 encapsulated SiO2 gel: Preparation and application in fire extinguishing.
Song He, Chichi Ruan, Yanjuan Shi, Guanyu Chen +4 more
2020Journal of Hazardous Materials66 citations
Semantic Scholar
Self-assembly cellulose nanocrystals/SiO2 composite aerogel under freeze-drying: Adsorption towards dye contaminant
Chichi Ruan, Yuansheng Ma, Gui-Bin Shi, C. He +5 more
2022Applications of Surface Science57 citations
Semantic Scholar
Line edge roughness impact on critical dimension variation
Yuansheng Ma, H. Levinson, T. Wallow
2007SPIE Advanced Lithography52 citations
Semantic Scholar
Decomposition strategies for self-aligned double patterning
Yuansheng Ma, Jason Sweis, C. Bencher, H. Dai +5 more
2010Advanced Lithography50 citations
Semantic Scholar
Hydrogen silsesquioxane as a high resolution negative-tone resist for extreme ultraviolet lithography
Ivan Junarsa, M. P. Stoykovich, P. Nealey, Yuansheng Ma +2 more
200549 citations Open access
Semantic Scholar
Challenges and opportunities in applying grapho-epitaxy DSA lithography to metal cut and contact/via applications
Yuansheng Ma, J. A. Torres, G. Fenger, Y. Granik +4 more
2014European Mask and Lithography Conference48 citations
Semantic Scholar
Line-edge roughness in 193-nm resists: lithographic aspects and etch transfer
T. Wallow, A. Acheta, Yuansheng Ma, A. Pawloski +7 more
2007SPIE Advanced Lithography33 citations
Semantic Scholar
Incorporating DSA in multipatterning semiconductor manufacturing technologies
Yasmine Badr, J. A. Torres, Yuansheng Ma, Joydeep Mitra +1 more
2015Advanced Lithography28 citations
Semantic Scholar
Considerations in source-mask optimization for logic applications
Yunfei Deng, Yi Zou, K. Yoshimoto, Yuansheng Ma +4 more
2010Advanced Lithography28 citations
Semantic Scholar
Structurally controllable hollow carbon spheres for gaseous benzene adsorption
Guanyu Chen, Xiaobing Yang, Yuansheng Ma, Chichi Ruan +4 more
2022Journal of Environmental Chemical Engineering27 citations
Semantic Scholar
Line edge roughness of sub-100 nm dense and isolated features: Experimental study
Yuansheng Ma, G. Tsvid, F. Cerrina
200325 citations
Semantic Scholar
Insight into ultra-flexible & robust silica aerogels based on diene synthesis reaction: preparation and oil/water separation
Chun-Hua Du, Yue-Ting Chen, Song He, Chichi Ruan +6 more
2022Applications of Surface Science22 citations
Semantic Scholar
Zr-based MOF @ carboxymethylated filter paper: Insight into construction and methylene blue removal mechanism
Gui-Bin Shi, Chichi Ruan, Song He, Hongjie Pan +5 more
202122 citations
Semantic Scholar
Line edge roughness and photoresist percolation development model
Yuansheng Ma, Jangho Shin, F. Cerrina
200321 citations
Semantic Scholar
Machine learning based wafer defect detection
Yuansheng Ma, Feng Wang, Qian Xie, Le Hong +6 more
2019Advanced Lithography20 citations
Semantic Scholar
Fermented Total Mixed Ration Alters Rumen Fermentation Parameters and Microbiota in Dairy Cows
Jiamei Song, Yuansheng Ma, Hengwei Zhang, Lijun Wang +2 more
2023Animals17 citations Open access
Semantic Scholar
Insight into pyrolysis of hydrophobic silica aerogels: kinetics, reaction mechanism and effect on the aerogels
Xin-Yu Liu, Hongliang Sheng, Song He, Chun-Hua Du +6 more
2022Chinese Journal of Chemical Engineering17 citations
Semantic Scholar
Calibration and application of a DSA Compact model for graphoepitaxy hole processes using contour-based metrology
G. Fenger, Andrew Burbine, J. A. Torres, Yuansheng Ma +5 more
2014Photomask Technology17 citations
Semantic Scholar
Physical verification and manufacturing of contact/via layers using grapho-epitaxy DSA processes
J. A. Torres, K. Sakajiri, D. Fryer, Y. Granik +9 more
2014Advanced Lithography16 citations
Semantic Scholar
Reduction of systematic defects with machine learning from design to fab
Yuansheng Ma, Le Hong, J. Word, F. Jiang +8 more
2020Advanced Lithography14 citations
Semantic Scholar
Modeling and characterization of contact-edge roughness for minimizing design and manufacturing variations in 32-nm node standard cell
Y. Ban, Yuansheng Ma, H. Levinson, Yunfei Deng +2 more
2010Advanced Lithography14 citations
Semantic Scholar
Directed self-assembly (DSA) grapho-epitaxy template generation with immersion lithography
Yuansheng Ma, Junjiang Lei, J. A. Torres, Le Hong +9 more
2015Advanced Lithography12 citations
Semantic Scholar
Modeling and characterization of contact-edge roughness for minimizing design and manufacturing variations
Y. Ban, Yuansheng Ma, H. Levinson, David Z. Pan
201011 citations
Semantic Scholar
Overcoming the challenges of 22-nm node patterning through litho-design co-optimization
M. Burkhardt, John Arnold, Zachary Baum, Sean D. Burns +27 more
2009Advanced Lithography11 citations
Semantic Scholar
EUV full-chip curvilinear mask options for logic via and metal patterning
N. Lafferty, Sagar Saxena, Keisuke Mizuuchi, Yuansheng Ma +5 more
2023Advanced Lithography9 citations
Semantic Scholar
Lithography and design integration — New paradigm for the technology architecture development
J. Kye, Yuansheng Ma, Lei Yuan, Yunfei Deng +1 more
2012Proceedings of the IEEE Custom Integrated Circuits Conference9 citations
Semantic Scholar
Dynamics of pulsating solitons derived from asymmetrical dispersive waves.
Cong-Cong Liu, Jiang-Yong He, Pan Wang, Deng-Ke Xing +6 more
2023Optics Express8 citations Open access
Semantic Scholar
Design technology co-optimization (DTCO) study on self-aligned-via (SAV) with Lamella DSA for sub-7 nm technology
Yuansheng Ma, J. Kye, Gurdaman S. Khaira, Le Hong +6 more
2017Advanced Lithography8 citations
Semantic Scholar
Directed self-assembly graphoepitaxy template generation with immersion lithography
Yuansheng Ma, Junjiang Lei, J. A. Torres, Le Hong +9 more
20158 citations
Semantic Scholar
Compact model experimental validation for grapho-epitaxy hole processes and its impact in mask making tolerances
G. Fenger, J. A. Torres, Yuansheng Ma, Y. Granik +5 more
2014European Mask and Lithography Conference8 citations
Semantic Scholar
Spacer defined double patterning for sub-72 nm pitch logic technology
R. Kim, E. Mclellan, Yun-Peng Yin, J. Arnold +8 more
2010Advanced Lithography7 citations
Semantic Scholar
Directed Self Assembly (DSA) compliant flow with immersion lithography: from material to design and patterning
Yuansheng Ma, Yan Wang, J. Word, Junjiang Lei +9 more
2016SPIE Advanced Lithography6 citations
Semantic Scholar
Effect of a surface inhibition layer on line edge roughnessa)
Yuansheng Ma, F. Cerrina
20056 citations
Semantic Scholar
A Workflow of Hotspot Prediction based on Semi-Supervised Machine Learning Methodology
Wenwen Zhang, Ken Chen, Xiao-Mei Li, Yuansheng Ma +4 more
20212021 International Workshop on Advanced Patterning Solutions (IWAPS)5 citations
Semantic Scholar
Modeling Sampling Strategy Optimization by Machine Learning Based Analysis
Wei Zhang, Bo Pang, Yuansheng Ma, Xiaomei Li +2 more
20212021 International Workshop on Advanced Patterning Solutions (IWAPS)5 citations
Semantic Scholar
Local line edge roughness in microphotonic devices: An electron-beam lithography study
Yuansheng Ma, Yang-Chun Cheng, F. Cerrina, T. Barwicz +1 more
20075 citations
Semantic Scholar
Directed self-assembly compliant flow with immersion lithography: from material to design and patterning
Yuansheng Ma, Yan Wang, J. Word, Junjiang Lei +8 more
20164 citations
Semantic Scholar
Optimizing curvilinear ILT recipe development with machine learning based pattern selection
Yuansheng Ma, Rui Wu, Junjiang Lei, Keisuke Mizuuchi +6 more
2021Photomask Technology3 citations
Semantic Scholar
Development, installation, and performance of the x-ray stepper JSAL 5C
Q. Leonard, D. H. Malueg, J. Wallace, James W. Taylor +10 more
20053 citations
Semantic Scholar
Combinational optical rule check on hotspot detection
A. Wei, Shao-Wen Gao, Yuansheng Ma, Shumay Dou Shang +4 more
2018Advanced Lithography2 citations
Semantic Scholar
Model-based guiding pattern synthesis for on-target and robust assembly of via and contact layers using DSA
Joydeep Mitra, A. Torres, Yuansheng Ma, David Z. Pan
2017Advanced Lithography2 citations
Semantic Scholar
Directed self assembly on resist-limited guiding patterns for hole grapho-epitaxy: Can DSA help lower EUV's source power requirements?
J. A. Torres, F. Jiang, Yuansheng Ma, Joerg Mellman +5 more
2015Advanced Lithography2 citations
Semantic Scholar
Proposal for determining exposure latitude requirements
H. Levinson, Yuansheng Ma, M. Koenig, B. L. La Fontaine +1 more
2008SPIE Advanced Lithography1 citations
Semantic Scholar
Effects of Laminaria japonica Polysaccharide Supplementation in Aged Corn-Based Diets on Growth Performance, Nutrient Digestibility, Rumen Fermentation, and Muscle Antioxidant Status of Hu Sheep
Hui-Wen Zheng, Weitong Peng, Jiamei Song, Yuansheng Ma +3 more
2026Animals0 citations Open access
Semantic Scholar
Dietary Laminaria japonica Polysaccharide Alleviates Aged-Maize-Associated Intestinal Oxidative Stress and Systemic Inflammation in Hu Sheep: Associations with Cecal Microbiome–Metabolome Remodeling
Jiaxuan Dong, Shuhan Li, Jiamei Song, Yuansheng Ma +3 more
2026Animals0 citations Open access
Semantic Scholar

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