Skip to content

Home Search Authors Pakistan News Saved

SciRah

SciRah does not host or store research papers. Results come live from free, official scholarly APIs, and every paper links back to its original source.

Data sources

OpenAlex
Semantic Scholar
Crossref
CORE
arXiv
PubMed

Privacy policy Terms of service

Yang-Chun Cheng · SciRah

Researcher profile · Semantic Scholar

Yang-Chun Cheng

Share profile

Yang-Chun Cheng — researcher profile on SciRah

h-index: 6
Works: 16
Citations: 207

Most-cited papers

Talbot lithography: Self-imaging of complex structures
A. Isoyan, F. Jiang, Yang-Chun Cheng, F. Cerrina +5 more
2009115 citations
Semantic Scholar
Extreme ultraviolet holographic lithography: Initial results
Yang-Chun Cheng, A. Isoyan, J. Wallace, Mumit Khan +1 more
200727 citations Open access
Semantic Scholar
A novel EUV exposure station for nanotechnology studies
J. Wallace, Yang-Chun Cheng, A. Isoyan, Quinn Leonard +5 more
200718 citations
Semantic Scholar
Progress in extreme ultraviolet interferometric and holographic lithography
A. Isoyan, Yang-Chun Cheng, F. Jiang, J. Wallace +2 more
200715 citations
Semantic Scholar
Patterning of SU-8 resist with digital micromirror device (DMD) maskless lithography
Tao Wang, M. Quaglio, F. Pirri, Yang-Chun Cheng +2 more
2009Advanced Lithography8 citations
Semantic Scholar
Engineering study of extreme ultraviolet interferometric lithography
F. Jiang, Yang-Chun Cheng, A. Isoyan, F. Cerrina
20098 citations
Semantic Scholar
Local line edge roughness in microphotonic devices: An electron-beam lithography study
Yuansheng Ma, Yang-Chun Cheng, F. Cerrina, T. Barwicz +1 more
20075 citations
Semantic Scholar
Extreme ultraviolet holographic lithography with a table-top laser
Artak Isoyan, F. Jiang, Yang-Chun Cheng, Przemyslaw W. Wachulak +5 more
2009Advanced Lithography4 citations
Semantic Scholar
Progress in extreme ultraviolet interferometric lithography at the University of Wisconsin
A. Isoyan, Yang-Chun Cheng, F. Jiang, J. Wallace +3 more
2008SPIE Advanced Lithography4 citations
Semantic Scholar
Coherent imaging nano-patterning with extreme ultraviolet laser illumination
A. Isoyan, F. Jiang, Yang-Chun Cheng, Przemyslaw W. Wachulak +5 more
20092009 Conference on Lasers and Electro-Optics and 2009 Conference on Quantum electronics and Laser Science Conference1 citations
Semantic Scholar
Extreme Ultraviolet Interferometric Lithography: A Path to Nanopatterning
F. Cerrina, Artak Isoyan, F. Jiang, Yang-Chun Cheng +6 more
20081 citations
Semantic Scholar
Extreme ultraviolet lasers demonstrate new nano-patterning schemes
M. Marconi, Przemyslaw W. Wachulak, L. Urbanski, C. Menoni +5 more
20102010 IEEE Photinic Society's 23rd Annual Meeting0 citations
Semantic Scholar
Table top ultraviolet lasers enable new nano-patterning schemes
M. Marconi, L. Urbanski, Przemyslaw W. Wachulak, Artak Isoyan +5 more
20092009 IEEE LEOS Annual Meeting Conference Proceedings0 citations
Semantic Scholar
Talbot nano-patterning with a table-top soft X-ray laser
L. Urbanski, P. Wachulak, A. Isoyan, Jian Fan +5 more
20090 citations
Semantic Scholar
Mask fabrication and its applications to extreme ultra-violet diffractive optics
Yang-Chun Cheng
20090 citations
Semantic Scholar
Table Top Schemes for Nano-Patterning with Extreme Ultraviolet Lasers
L. Urbanski, P. Wachulak, A. Isoyan, Jian Fan +5 more
20090 citations
Semantic Scholar

Frequent co-authors

Invite them to SciRah by sharing their profile.

F. Cerrina×15
Invite
F. Cerrina — researcher profile on SciRah
A. Isoyan×9
Invite
A. Isoyan — researcher profile on SciRah
F. Jiang×9
Invite
F. Jiang — researcher profile on SciRah
L. Urbanski×7
Invite
L. Urbanski — researcher profile on SciRah

×7

Invite

C. Menoni — researcher profile on SciRah

Invite

M. Marconi — researcher profile on SciRah

Invite

J. Wallace — researcher profile on SciRah

Artak Isoyan×4

Przemyslaw W. Wachulak×4

Invite

Przemyslaw W. Wachulak — researcher profile on SciRah

Invite

J. Rocca — researcher profile on SciRah

Invite

P. Wachulak — researcher profile on SciRah

Invite

J. Rocca — researcher profile on SciRah