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Feng Wang · SciRah

Researcher profile · Semantic Scholar

Feng Wang

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Feng Wang — researcher profile on SciRah

h-index: 1
Works: 2
Citations: 20

Most-cited papers

Machine learning based wafer defect detection
Yuansheng Ma, Feng Wang, Qian Xie, Le Hong +6 more
2019Advanced Lithography20 citations
Semantic Scholar
Aerial image ORC checks and their correlation to wafer-edge yield limitation for metals: a study and an OPC resolution
Tamer F. Desouky, Yi-Xin Zhang, M. Terry, Haizhou Yin +13 more
2017Photomask Technology0 citations
Semantic Scholar

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