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Takayuki Yano · SciRah

Researcher profile · Semantic Scholar

Takayuki Yano

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Takayuki Yano — researcher profile on SciRah

h-index: 4
Works: 8
Citations: 38

Most-cited papers

Low-dose SIMOX wafers for LSIs fabricated with internal-thermal-oxidation (ITOX) process: electrical characterization
A. Matsumura, K. Kawamura, Isao Hamaguchi, S. Takayama +2 more
199912 citations
Semantic Scholar
Analysis of Buried-Oxide Dielectric Breakdown Mechanism in Low-Dose Separation by Implanted Oxygen (SIMOX) Substrates Fabricated by Internal Thermal Oxidation (ITOX) Process
K. Kawamura, Takayuki Yano, Isao Hamaguchi, S. Takayama +2 more
199910 citations Open access
Semantic Scholar
Gate oxide integrity on ITOX-SIMOX substrates and influence of test device geometry on characterization
K. Kawamura, H. Deai, H. Sakamoto, Takayuki Yano +5 more
20016 citations
Semantic Scholar
Improvement of buried oxide quality in low-dose SIMOX wafers by high-temperature oxidation
K. Kawamura, Tatsuo Nakajima, Isao Hamaguchi, Takayuki Yano +2 more
19951995 IEEE International SOI Conference Proceedings5 citations
Semantic Scholar
Buried oxide leakage in low dose SIMOX materials
Tatsuo Nakajima, Takayuki Yano, Isao Hamaguchi, Masaharu Tachimori +1 more
1994Proceedings. IEEE International SOI Conference3 citations
Semantic Scholar
An analysis of buried-oxide growth in low-dose SIMOX wafers by high-temperature thermal oxidation
S. Masui, K. Kawamura, Isao Hamaguchi, Takayuki Yano +2 more
19951995 IEEE International SOI Conference Proceedings1 citations
Semantic Scholar
Evaluation of fixed oxide charge and oxide-silicon interface trap densities in low-dose and high-dose SIMOX wafers
S. Masui, Tatsuo Nakajima, K. Kawamura, Takayuki Yano +3 more
1994Proceedings. IEEE International SOI Conference1 citations
Semantic Scholar
Experimental verification of buried-oxide with over-8 MV/cm breakdown fields in low-dose SIMOX wafers
K. Kawamura, Atsuki Matsumura, Takayuki Yano, Isao Hamaguchi +4 more
19971997 IEEE International SOI Conference Proceedings0 citations
Semantic Scholar

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Isao Hamaguchi×8
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Isao Hamaguchi — researcher profile on SciRah
Masaharu Tachimori×6
K. Kawamura×5
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K. Kawamura — researcher profile on SciRah
S. Takayama×4
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S. Takayama — researcher profile on SciRah
Tatsuo Nakajima×4
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Tatsuo Nakajima — researcher profile on SciRah

A. Matsumura×3

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A. Matsumura — researcher profile on SciRah

Yoichi Nagatake×3

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K. Kawamura — researcher profile on SciRah

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S. Masui — researcher profile on SciRah

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Y. Nagatake — researcher profile on SciRah

H. Deai×1

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H. Sakamoto — researcher profile on SciRah