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K. Kawamura · SciRah

Researcher profile · Semantic Scholar

K. Kawamura

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K. Kawamura — researcher profile on SciRah

h-index: 8
Works: 46
Citations: 382

Most-cited papers

High thermal conductivity in wafer-scale cubic silicon carbide crystals
Zhe Cheng, Jianbo Liang, K. Kawamura, Hao Zhou +9 more
2022Nature Communications190 citations Open access
Semantic Scholar
A Temperature Stable Amplifier Characteristics of AlGaN/GaN HEMTs on 3C-SiC/Si
A. Bose, Debaleen Biswas, S. Hishiki, Sumito Ouchi +3 more
2021IEEE Access27 citations Open access
Semantic Scholar
MOVPE growth of GaN on Si substrate with 3C-SiC buffer layer
M. Katagiri, H. Fang, H. Miyake, K. Hiramatsu +3 more
201419 citations
Semantic Scholar
Technological innovation in low-dose SIMOX wafers fabricated by an internal thermal oxidation (ITOX) process
Atsuki Matsumura, Isao Hamaguchi, K. Kawamura, Tsutomu Sasaki +2 more
200318 citations
Semantic Scholar
Elimination of the Low Resistivity of Si Substrates in GaN HEMTs by Introducing a SiC Intermediate and a Thick Nitride Layer
A. Bose, Debaleen Biswas, S. Hishiki, Sumito Ouchi +3 more
2020IEEE Electron Device Letters17 citations
Semantic Scholar
AlGaN/GaN/3C-SiC on diamond HEMTs with thick nitride layers prepared by bonding-first process
R. Kagawa, K. Kawamura, Yoshiki Sakaida, Sumito Ouchi +6 more
2022Applied Physics Express14 citations Open access
Semantic Scholar
Analysis of Buried-Oxide Dielectric Breakdown Mechanism in Low-Dose Separation by Implanted Oxygen (SIMOX) Substrates Fabricated by Internal Thermal Oxidation (ITOX) Process
K. Kawamura, Takayuki Yano, Isao Hamaguchi, S. Takayama +2 more
199910 citations Open access
Semantic Scholar
Evaluation of Fixed Charge and Interface Trap Densities in SIMOX Wafers and Their Effects on Device Characteristics
S. Masui, Tatsuo Nakajima, K. Kawamura, T. Yano +2 more
19958 citations
Semantic Scholar
High interfacial quality metal-oxide-semiconductor capacitor on (111) oriented 3C-SiC with Al2O3 interlayer and its internal charge analysis
R. Oka, Keisuke Yamamoto, H. Akamine, Dong Wang +3 more
2020Japanese Journal of Applied Physics6 citations
Semantic Scholar
Properties of GaN grown on Si(111) substrates dependent on the thickness of 3C-SiC intermediate layers
H. Fang, M. Katagiri, H. Miyake, K. Hiramatsu +3 more
20146 citations
Semantic Scholar
Realization of Maskless Epitaxial Lateral Overgrowth of GaN on 3C-SiC/Si Substrates
H. Fang, Yoshifumi Takaya, H. Miyake, K. Hiramatsu +3 more
20136 citations
Semantic Scholar
Study of High-Quality and Crack-Free GaN Growth on 3C-SiC/Separation by Implanted Oxygen (111)
M. Narukawa, Hidetoshi Asamura, K. Kawamura, H. Miyake +1 more
20106 citations
Semantic Scholar
Current-Path Observation in Low-Dose SIMOX (Separation by Implanted Oxygen) Buried-SiO2 Layer
K. Kajiyama, Y. Hashiguchi, Y. Ikematsu, Isao Hamaguchi +5 more
19956 citations
Semantic Scholar
AlGaN/GaN HEMT on 3C-SiC/Low-Resistivity Si Substrate for Microwave Applications
A. Wakejima, A. Bose, Debaleen Biswas, S. Hishiki +3 more
2022IEICE transactions on electronics5 citations Open access
Semantic Scholar
Local Structural Investigation of (Ba,Ca)(Zr,Ti)O3 and Ca(Zr,Ti)O3 by X‐Ray Fluorescence Holography
Yuta Yamamoto, K. Kimura, A. Gadelmawla, K. Kawamura +9 more
2022physica status solidi (b)5 citations
Semantic Scholar
Influence of a thick nitride layer on transmission loss in GaN-on-3C-SiC/low resistivity Si
A. Bose, Debaleen Biswas, S. Hishiki, Sumito Ouchi +3 more
2022IEICE Electronics Express5 citations Open access
Semantic Scholar
Strain control of GaN grown on 3C-SiC/Si substrate using AlGaN buffer layer
H. Fang, Yoshifumi Takaya, S. Ohuchi, H. Miyake +3 more
20125 citations
Semantic Scholar
Study on the effects of AlN interlayer in thick GaN grown on 3C-SiC/Si substrates
H. Fang, Yoshifumi Takaya, H. Miyake, K. Hiramatsu +3 more
20134 citations
Semantic Scholar
Influence of Oxygen Partial Pressure on Thickness Change of Buried Oxide in Silicon-on-Insulator Structure during High-Temperature Oxidation Processes
K. Kawamura, T. Motooka
20064 citations Open access
Semantic Scholar
High channel mobility of 3C-SiC n-MOSFETs with gate stacks formed at low temperature—the importance of Coulomb scattering suppression
Keisuke Yamamoto, Dong Wang, H. Nakashima, S. Hishiki +3 more
2022Applied Physics Express3 citations Open access
Semantic Scholar
Crack‐free GaN grown by using maskless epitaxial lateral overgrowth on Si substrate with thin SiC intermediate layer
H. Fang, M. Katagiri, H. Miyake, K. Hiramatsu +3 more
20143 citations
Semantic Scholar
Heterointerfaces of CdTe/α-Sn /InSb structure grown by molecular beam epitaxy
A. Sasaki, T. Suzuki, M. Kimata, M. Yano +1 more
19943 citations
Semantic Scholar
Selective Direct Bonding of High Thermal Conductivity 3C-SiC Film to \b{eta}-Ga2O3 for Top-Side Heat Extraction
Jianbo Liang, H. Nagai, Zhe Cheng, K. Kawamura +7 more
20222 citations
Semantic Scholar
Interaction of the dual effects triggered by AlN interlayers in thick GaN grown on 3C-SiC/Si substrates
H. Fang, Yoshifumi Takaya, H. Miyake, K. Hiramatsu +2 more
20122 citations
Semantic Scholar
SIMS study of oxygen in- and out-diffusion in SIMOX wafers during thermal annealing using 18O implantation
S. Hayashi, T. Sasaki, K. Kawamura, A. Matsumura +2 more
20032 citations
Semantic Scholar
Molecular beam epitaxy grown CdTe/α-Sn/CdTe single quantum well structures
A. B. Villaflor, K. Shimomura, K. Kawamura, A. Belogorokhov +1 more
19952 citations
Semantic Scholar
Stabilized α‐Sn grown at high temperature by molecular beam epitaxy
M. Kimata, T. Suzuki, K. Saino, K. Kawamura +1 more
19942 citations
Semantic Scholar
Fabrication of GaN/SiC/diamond structure for efficient thermal management of power device
R. Kagawa, K. Kawamura, Yoshiki Sakaida, Sumito Ouchi +6 more
20212021 7th International Workshop on Low Temperature Bonding for 3D Integration (LTB-3D)1 citations
Semantic Scholar
Fabrication of Ga2O3/3C-SiC direct bonding for efficient surface heat dissipation
H. Nagai, K. Kawamura, Yoshiki Sakaida, H. Uratani +5 more
20212021 7th International Workshop on Low Temperature Bonding for 3D Integration (LTB-3D)1 citations
Semantic Scholar
Surface smoothing effect in patterned SOI fabrication with SIMOX technology
T. Sasaki, S. Takayama, K. Kawamura, T. Maeda +2 more
20032003 IEEE International Conference on SOI1 citations
Semantic Scholar
An analysis of buried-oxide growth in low-dose SIMOX wafers by high-temperature thermal oxidation
S. Masui, K. Kawamura, Isao Hamaguchi, Takayuki Yano +2 more
19951995 IEEE International SOI Conference Proceedings1 citations
Semantic Scholar
Effect of Thick Nitride Layer on The RF Performance in GaN HEMTs on 3C-SiC/Si
A. Bose, Debaleen Biswas, S. Hishiki, Sumito Ouchi +3 more
2020Extended Abstracts of the 2020 International Conference on Solid State Devices and Materials0 citations
Semantic Scholar
Large-Diameter 3C-SiC/Si Hetero-Epitaxial Substrates and Thick, High-Quality GaN Epitaxial Layers Grown on These Substrates for GaN Power Applications
K. Kawamura, S. Hishiki, H. Uratani, Sumito Ouchi +8 more
2020Extended Abstracts of the 2020 International Conference on Solid State Devices and Materials0 citations
Semantic Scholar
Charge analysis of SiO 2 /Al 2 O 3 gate dielectric on (111) oriented 3C-SiC
R. Oka, Keisuke Yamamoto, Dong Wang, H. Nakashima +2 more
20190 citations
Semantic Scholar
3C-SiC n-MOS capacitor and n-MOSFET with SiO 2 /Al 2 O 3 insulator
Keisuke Yamamoto, R. Oka, Dong Wang, H. Nakashima +2 more
20190 citations
Semantic Scholar
Impact of Al2O3 interlayer for metal-oxide-semiconductor capacitor on (111) oriented 3C-SiC for electronic device application
Keisuke Yamamoto, Dong Wang, H. Nakashima, S. Hishiki +1 more
2018Extended Abstracts of the 2018 International Conference on Solid State Devices and Materials0 citations
Semantic Scholar
Electrical Characterization of Free-Standing 3C-SiC(111) Substrates Grown by Gas-Source Molecular Beam Epitaxy
Y. Nakano, Hidetoshi Asamura, Sumito Oouchi, M. Narukawa +2 more
20160 citations
Semantic Scholar
Growth of GaN with thin 3C-SiC buffer layer on Si(111) substrate
M. Katagiri, Kentaro Izumi, H. Miyake, K. Hiramatsu +3 more
20130 citations
Semantic Scholar
Procédé de fabrication de substrat semi-conducteur
K. Kawamura, S. Takayama, B. Murphy
20080 citations
Semantic Scholar
Quality Improvement of SIMOX Wafers with Nitrogen-Doped CZ Silicon Crystal( Advanced Devices and, Science and Technology)
Tsutomu Sasaki, K. Kawamura, S. Takayama, T. Maeda +2 more
20040 citations
Semantic Scholar
Quality improvement of SIMOX wafers by utilizing nitrogen-doped CZ silicon crystal
K. Kawamura, Isao Hamaguchi, Tsutomu Sasaki, S. Takayama +2 more
20030 citations
Semantic Scholar
Wafer stage, wafer holder assembly and heat treatment furnace
K. Kawamura, Tsutomu Sasaki, A. Matsumura, A. Ikari +4 more
20010 citations
Semantic Scholar
Substrat simox et procede de production dudit substrat
K. Kawamura, Atsuki Matsumura, Toshiyuki Mizutani
20010 citations
Semantic Scholar
Asymmetric behavior of monolayer holes after growth in GaAs molecular beam epitaxy revealed by in situ scanning electron microscopy
K. Tanahashi, K. Kawamura, N. Inoue, Y. Homma
19990 citations
Semantic Scholar
Analysis of Buried-Oxide Dielectric Breakdown Mechanism in Low-Dose SIMOX Structures
K. Kawamura, T. Yano, Isao Hamaguchi, S. Takayama +2 more
19980 citations
Semantic Scholar
EXPERIMENTAL VERIFTCATION OF BURIED-0 WITH OVER-SMVkm BREAKDOWN FIELDS IN LOW-DOSE SIMOX WAF'ERS
K. Kawamura, Atsuki Matsumura, T. Yano, Isao Hamaguchi +4 more
19970 citations
Semantic Scholar

Frequent co-authors

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S. Hishiki×11
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S. Hishiki — researcher profile on SciRah
Hidetoshi Asamura×10
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Hidetoshi Asamura — researcher profile on SciRah
H. Miyake×9
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H. Miyake — researcher profile on SciRah
K. Hiramatsu×9
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K. Hiramatsu — researcher profile on SciRah

×9

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Isao Hamaguchi — researcher profile on SciRah

Sumito Ouchi×8

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Sumito Ouchi — researcher profile on SciRah

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S. Takayama — researcher profile on SciRah

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H. Uratani — researcher profile on SciRah

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H. Fang — researcher profile on SciRah

A. Matsumura×7

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A. Matsumura — researcher profile on SciRah

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K. Kitahara — researcher profile on SciRah

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H. Oku — researcher profile on SciRah