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J. Bogdanowicz · SciRah

Researcher profile · Semantic Scholar

J. Bogdanowicz

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J. Bogdanowicz — researcher profile on SciRah

h-index: 13
Works: 99
Citations: 613

Most-cited papers

Laser pulsing of field evaporation in atom probe tomography
Thomas F. Kelly, A. Vella, J. Bunton, J. Houard +3 more
201478 citations
Semantic Scholar
Dopant, composition and carrier profiling for 3D structures
W. Vandervorst, C. Fleischmann, J. Bogdanowicz, A. Franquet +3 more
201744 citations
Semantic Scholar
Active dopant characterization methodology for germanium
T. Clarysse, P. Eyben, T. Janssens, I. Hoflijk +6 more
200631 citations
Semantic Scholar
Very Low Temperature Epitaxy of Group-IV Semiconductors for Use in FinFET, Stacked Nanowires and Monolithic 3D Integration
C. Porret, A. Hikavyy, J. Granados, S. Baudot +14 more
2019ECS Journal of Solid State Science and Technology29 citations Open access
Semantic Scholar
Atom probe tomography for advanced nanoelectronic devices: Current status and perspectives
J. Barnes, A. Grenier, I. Mouton, S. Barraud +9 more
201726 citations
Semantic Scholar
Atom probe tomography analysis of SiGe fins embedded in SiO2: Facts and artefacts.
D. Melkonyan, C. Fleischmann, L. Arnoldi, J. Demeulemeester +4 more
2017Ultramicroscopy26 citations Open access
Semantic Scholar
On the analysis of the activation mechanisms of sub-melt laser anneals
T. Clarysse, J. Bogdanowicz, Jozefien Goossens, A. Moussa +9 more
200826 citations Open access
Semantic Scholar
Laser-assisted atom probe tomography of semiconductors: The impact of the focused-ion beam specimen preparation.
J. Bogdanowicz, Arul Kumar, C. Fleischmann, M. Gilbert +3 more
2018Ultramicroscopy20 citations Open access
Semantic Scholar
Light absorption in conical silicon particles.
J. Bogdanowicz, M. Gilbert, N. Innocenti, S. Koelling +2 more
2013Optics Express19 citations Open access
Semantic Scholar
On the interplay between relaxation, defect formation, and atomic Sn distribution in Ge(1−x)Sn(x) unraveled with atom probe tomography
Arul Kumar, J. Demeulemeester, J. Bogdanowicz, J. Bran +7 more
201518 citations
Semantic Scholar
Low temperature epitaxial growth of Ge:B and Ge0.99Sn0.01:B source/drain for Ge pMOS devices: in-situ and conformal B-doping, selectivity towards oxide and nitride with no need for any post-epi activation treatment
A. Vohra, C. Porret, D. Kohen, S. Folkersma +9 more
2019Japanese Journal of Applied Physics15 citations Open access
Semantic Scholar
Spectroscopy: a new route towards critical-dimension metrology of the cavity etch of nanosheet transistors
J. Bogdanowicz, Yusuke Oniki, K. Kenis, Yusuke Muraki +14 more
2021Advanced Lithography13 citations
Semantic Scholar
Potential sources of compositional inaccuracy in the atom probe tomography of InxGa1-xAs.
Ramya Cuduvally, R. J. Morris, P. Ferrari, J. Bogdanowicz +3 more
2019Ultramicroscopy13 citations Open access
Semantic Scholar
Anisotropic stress in narrow sGe fin field-effect transistor channels measured using nano-focused Raman spectroscopy
T. Nuytten, J. Bogdanowicz, L. Witters, G. Eneman +6 more
201813 citations Open access
Semantic Scholar
Structural analysis and resistivity measurements of InAs and GaSb fins on 300 mm Si for vertical (T)FET
Y. Mols, J. Bogdanowicz, P. Favia, P. Lagrain +3 more
2019Journal of Applied Physics12 citations
Semantic Scholar
Advanced Raman Spectroscopy Using Nanofocusing of Light
T. Nuytten, J. Bogdanowicz, T. Hantschel, A. Schulze +4 more
201712 citations Open access
Semantic Scholar
Assessment of the Model
J. Bogdanowicz
201212 citations
Semantic Scholar
Pushing the boundaries of EUV scatterometry: reconstruction of complex nanostructures for next-generation transistor technology
R. Ciesielski, Leonhard M Lohr, Hans Mertens, A. Charley +5 more
2023Advanced Lithography11 citations
Semantic Scholar
Nanofocusing of light into semiconducting fin photonic crystals
J. Bogdanowicz, T. Nuytten, A. Gawlik, A. Schulze +2 more
201611 citations Open access
Semantic Scholar
Model-free measurement of lateral recess in gate-all-around transistors with micro hard-X-ray fluorescence
J. Bogdanowicz, Y. Oniki, K. Kenis, P. P. Gowda +6 more
2023Journal of Micro/Nanopatterning, Materials, and Metrology10 citations Open access
Semantic Scholar
Detection of bonding voids for 3D integration
Cong Chen, D. van den Heuvel, Matteo Beggiato, Bensu Tunca Altintas +8 more
2023Advanced Lithography8 citations
Semantic Scholar
Low‐Temperature Selective Growth of Heavily Boron‐Doped Germanium Source/Drain Layers for Advanced pMOS Devices
C. Porret, A. Vohra, Nobuya Nakazaki, A. Hikavyy +7 more
2019Physica Status Solidi (a)7 citations
Semantic Scholar
Width‐Dependent Sheet Resistance of Nanometer‐Wide Si Fins as Measured with Micro Four‐Point Probe
J. Bogdanowicz, S. Folkersma, S. Sergeant, A. Schulze +6 more
20187 citations Open access
Semantic Scholar
A variable probe pitch micro-Hall effect method
Maria-Louise Witthøft, F. Østerberg, J. Bogdanowicz, R. Lin +3 more
2018Beilstein Journal of Nanotechnology7 citations Open access
Semantic Scholar
Measurement of the apex temperature of a nanoscale semiconducting field emitter illuminated by a femtosecond pulsed laser
Arul Kumar, J. Bogdanowicz, J. Demeulemeester, J. Bran +3 more
2018Journal of Applied Physics7 citations Open access
Semantic Scholar
(Invited) Very Low Temperature Epitaxy of Group-IV Semiconductors for Use in FinFET, Stacked Nanowires and Monolithic 3D Integration
C. Porret, A. Hikavyy, Juan Fernando Gomez Granados, S. Baudot +14 more
2018ECS Transactions7 citations Open access
Semantic Scholar
Photovoltage versus microprobe sheet resistance measurements on ultrashallow structures
T. Clarysse, A. Moussa, B. Parmentier, J. Bogdanowicz +8 more
20107 citations Open access
Semantic Scholar
Inspection and metrology challenges for 3 nm node devices and beyond
T. Shohjoh, M. Ikota, M. Isawa, G. Lorusso +6 more
2021International Electron Devices Meeting6 citations
Semantic Scholar
Wet-chemical etching of atom probe tips for artefact free analyses of nanoscaled semiconductor structures.
D. Melkonyan, C. Fleischmann, A. Veloso, A. Franquet +3 more
2018Ultramicroscopy6 citations
Semantic Scholar
Enhanced light coupling into periodic arrays of nanoscale semiconducting fins
A. Gawlik, J. Bogdanowicz, A. Schulze, T. Nuytten +3 more
2018Applied Physics Letters6 citations
Semantic Scholar
Impact of the apex of an elongated dielectric tip upon its light absorption properties
J. Bogdanowicz, M. Gilbert, S. Koelling, W. Vandervorst
20146 citations
Semantic Scholar
Metrology for Implanted Si Substrate Loss Studies
D. Radisic, D. Shamiryan, G. Mannaert, W. Boullart +7 more
20106 citations Open access
Semantic Scholar
Advances in optical carrier profiling through high-frequency modulated optical reflectance
J. Bogdanowicz, F. Dortu, T. Clarysse, W. Vandervorst +4 more
20086 citations
Semantic Scholar
Impact of inactive dopants in chemical vapor deposition layers on photomodulated optical reflectance
J. Bogdanowicz, F. Dortu, T. Clarysse, W. Vandervorst +3 more
20086 citations
Semantic Scholar
Critical dimension metrology using Raman spectroscopy
A. Gawlik, J. Bogdanowicz, T. Nuytten, A. Charley +3 more
20205 citations Open access
Semantic Scholar
Optical shaping of a nano-scale tip by femtosecond laser assisted field evaporation
E. Di Russo, J. Houard, V. Langolff, S. Moldovan +5 more
20185 citations
Semantic Scholar
Optimal laser positioning for laser-assisted atom probe tomography.
S. Koelling, N. Innocenti, J. Bogdanowicz, W. Vandervorst
2013Ultramicroscopy5 citations
Semantic Scholar
Nondestructive extraction of junction depths of active doping profiles from photomodulated optical reflectance offset curves
J. Bogdanowicz, F. Dortu, T. Clarysse, W. Vandervorst +5 more
20105 citations Open access
Semantic Scholar
Small target compatible dimensional and analytical metrology for semiconductor nanostructures using x-ray fluorescence techniques
P. Hönicke, Y. Kayser, V. Soltwisch, André Wählisch +15 more
2023Advanced Lithography4 citations
Semantic Scholar
A Bottom-Up Volume Reconstruction Method for Atom Probe Tomography
Yu-Ting Ling, Siegfried Cools, J. Bogdanowicz, C. Fleischmann +3 more
2022Microscopy and Microanalysis4 citations Open access
Semantic Scholar
Electrothermal theory of photomodulated optical reflectance on active doping profiles in silicon
J. Bogdanowicz, F. Dortu, T. Clarysse, W. Vandervorst +1 more
20104 citations
Semantic Scholar
Impact of band gap narrowing and surface recombination on photoelectrothermal modulated optical reflectance power curves
F. Dortu, J. Bogdanowicz, T. Clarysse, W. Vandervorst
20084 citations
Semantic Scholar
Superbots: Modular, Multifunctional, Reconfigurable Robotic System for Space Exploration
Wei-Min Shen, J. Bogdanowicz, W. Chun, Mark H. Yim +7 more
20054 citations
Semantic Scholar
Raman spectroscopy capabilities for advanced semiconductor technology devices
T. Nuytten, J. Bogdanowicz, S. Sergeant, Claudia Fleischmann
2024Applied Physics Letters3 citations Open access
Semantic Scholar
Taming the Distribution of Light in Gate-All-Around Semiconductor Devices.
J. Bogdanowicz, T. Nuytten, Andrzej Gawlik, S. Sergeant +4 more
2024Nano letters (Print)3 citations
Semantic Scholar
300mm in-line metrologies for the characterization of ultra-thin layer of 2D materials
A. Moussa, J. Bogdanowicz, B. Groven, Pierre-Olivier Morin +13 more
2023Advanced Lithography3 citations
Semantic Scholar
Recess metrology challenges for 3D device architectures in advanced technology nodes
G. Santoro, Kevin Houchens, J. Bogdanowicz, Moshe Elizov +17 more
2022Advanced Lithography3 citations
Semantic Scholar
High throughput scanning probe metrology for high-NA EUV photoresist profiling
Artem Khatchaturiants, M. Mucientes, Arseniy Kalinin, Yan Guo +11 more
2022Metrology, Inspection, and Process Control XXXVI3 citations
Semantic Scholar
Electrical characterization of single nanometer-wide Si fins in dense arrays
S. Folkersma, J. Bogdanowicz, A. Schulze, P. Favia +6 more
2018Beilstein Journal of Nanotechnology3 citations Open access
Semantic Scholar
Metrology for Implanted Si Substrate and Dopant Loss Studies
Dunja Radisic, D. Shamiryan, G. Mannaert, W. Boullart +7 more
20093 citations Open access
Semantic Scholar

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