Skip to content

Home Search Authors Pakistan News Saved

SciRah

SciRah does not host or store research papers. Results come live from free, official scholarly APIs, and every paper links back to its original source.

Data sources

OpenAlex
Semantic Scholar
Crossref
CORE
arXiv
PubMed

Privacy policy Terms of service

F. Yano · SciRah

Researcher profile · Semantic Scholar

F. Yano

Share profile

F. Yano — researcher profile on SciRah

h-index: 16
Works: 54
Citations: 868

Most-cited papers

Nitridation process of sapphire substrate surface and its effect on the growth of GaN
K. Uchida, A. Watanabe, F. Yano, M. Kouguchi +2 more
1996242 citations
Semantic Scholar
Dopant distribution in gate electrode of n- and p-type metal-oxide-semiconductor field effect transistor by laser-assisted atom probe
K. Inoue, F. Yano, A. Nishida, H. Takamizawa +3 more
200961 citations
Semantic Scholar
Origin of characteristic variability in metal-oxide-semiconductor field-effect transistors revealed by three-dimensional atom imaging
H. Takamizawa, Y. Shimizu, K. Inoue, T. Toyama +7 more
201140 citations
Semantic Scholar
Behavior of phosphorous and contaminants from molecular doping combined with a conventional spike annealing method.
Y. Shimizu, H. Takamizawa, K. Inoue, F. Yano +5 more
2014Nanoscale39 citations
Semantic Scholar
IrO2/Pb(ZrxTi1-x)O3(PZT)/Pt Ferroelectric Thin-Film Capacitors Resistant to Hydrogen-Annealing Damage
K. Kushida-Abdelghafar, Hiroshi Miki, F. Yano, Y. Fujisaki
199736 citations Open access
Semantic Scholar
The Study of Ultrathin Tantalum Oxide Films before and after Annealing with X-Ray Photoelectron Spectroscopy
A. Muto, F. Yano, Yasuhiro Sugawara, Shimpei Iijima
199435 citations
Semantic Scholar
Monolayer segregation of As atoms at the interface between gate oxide and Si substrate in a metal-oxide-semiconductor field effect transistor by three-dimensional atom-probe technique
K. Inoue, F. Yano, A. Nishida, T. Tsunomura +3 more
200828 citations
Semantic Scholar
X‐ray photoelectron spectroscopy study of submonolayer native oxides on HF‐treated Si surfaces
F. Yano, A. Hiraoka, T. Itoga, H. Kojima +2 more
199527 citations
Semantic Scholar
Influence of laser power on atom probe tomographic analysis of boron distribution in silicon.
Y. Tu, H. Takamizawa, Bin Han, Y. Shimizu +5 more
2017Ultramicroscopy26 citations
Semantic Scholar
Correlation between threshold voltage and channel dopant concentration in negative-type metal-oxide-semiconductor field-effect transistors studied by atom probe tomography
H. Takamizawa, Y. Shimizu, K. Inoue, T. Toyama +10 more
201225 citations
Semantic Scholar
Analysis of SiO2-to-Si3N4 selectivity in reactive ion etching using additional O2 gas
M. Matsui, F. Uchida, M. Kojima, T. Tokunaga +2 more
200225 citations
Semantic Scholar
Phosphorus and boron diffusion paths in polycrystalline silicon gate of a trench-type three-dimensional metal-oxide-semiconductor field effect transistor investigated by atom probe tomography
Bing Han, H. Takamizawa, Y. Shimizu, K. Inoue +5 more
201524 citations
Semantic Scholar
Impact of carbon coimplantation on boron behavior in silicon: Carbon–boron coclustering and suppression of boron diffusion
Y. Shimizu, H. Takamizawa, K. Inoue, T. Toyama +8 more
201124 citations
Semantic Scholar
Role of hydrogen during rapid vapor-phase doping analyzed by x-ray photoelectron spectroscopy and Fourier-transform infrared-attenuated total reflection
Y. Kiyota, F. Yano, Seiji Suzuki, T. Inada
199823 citations
Semantic Scholar
Influence of ion-implantation on native oxidation of Si in a clean-room atmosphere
F. Yano, A. Hiraoka, T. Itoga, H. Kojima +2 more
199620 citations
Semantic Scholar
Three-Dimensional Characterization of Deuterium Implanted in Silicon Using Atom Probe Tomography
H. Takamizawa, K. Hoshi, Yasuo Shimizu, F. Yano +4 more
201317 citations Open access
Semantic Scholar
Quantitative analysis of hydrogen in SiO2/SiN/SiO2 stacks using atom probe tomography
Y. Kunimune, Y. Shimada, Yusuke Sakurai, M. Inoue +10 more
201616 citations Open access
Semantic Scholar
Impact of carbon co-implantation on boron distribution and activation in silicon studied by atom probe tomography and spreading resistance measurements
Y. Shimizu, H. Takamizawa, K. Inoue, F. Yano +4 more
201616 citations
Semantic Scholar
Deconvolution of scanning electron microscopy images
F. Yano, S. Nomura
199316 citations
Semantic Scholar
Formation and oxidation properties of (Ti1−xAlx)N thin films prepared by dc reactive sputtering
Y. Matsui, M. Hiratani, Y. Nakamura, I. Asano +1 more
200215 citations
Semantic Scholar
Time-resolved acquisition technique for spatially-resolved electron energy-loss spectroscopy by energy-filtering TEM.
S. Terada, T. Aoyama, F. Yano, Y. Mitsui
2002Journal of Electron Microscopy14 citations
Semantic Scholar
Physical and chemical analytical instruments far failure analyses in Gbit devices
Y. Mitsui, F. Yano, Y. Nakamura, K. Kimoto +3 more
1998International Electron Devices Meeting 1998. Technical Digest (Cat. No.98CH36217)12 citations
Semantic Scholar
Three-Dimensional Dopant Characterization of Actual Metal–Oxide–Semiconductor Devices of 65 nm Node by Atom Probe Tomography
K. Inoue, H. Takamizawa, Y. Shimizu, F. Yano +11 more
201310 citations Open access
Semantic Scholar
Channel Dopant Distribution in Metal–Oxide–Semiconductor Field-Effect Transistors Analyzed by Laser-Assisted Atom Probe Tomography
H. Takamizawa, K. Inoue, Y. Shimizu, T. Toyama +5 more
201110 citations
Semantic Scholar
Characterization of nitridated layers and their effect on the growth and quality of GaN
K. Uchida, A. Watanabe, F. Yano, M. Kouguchi +2 more
199710 citations
Semantic Scholar
X‐ray photoelectron spectroscopy study on native oxidation of As‐implanted Si (100)
F. Yano, A. Hiraoka, T. Itoga, A. Matsubara +3 more
19968 citations
Semantic Scholar
Infrared study of electron‐beam‐induced reactions in Langmuir–Blodgett films of stearic acid
F. Yano, V. Burrows, M. Kozicki, Joseph V. Ryan
19938 citations
Semantic Scholar
Effect of carbon on boron diffusion and clustering in silicon: Temperature dependence study
Y. Tu, Y. Shimizu, Yorinobu Kunimune, Y. Shimada +6 more
2018Journal of Applied Physics6 citations
Semantic Scholar
Developments of new concept analytical instruments for failure analyses of sub-100 nm devices
Y. Mitsui, F. Yano, H. Kakibayashi, H. Shichi +1 more
2001Microelectronics and reliability6 citations
Semantic Scholar
Possible Origins of Extra Threshold Voltage Variability in N-Type Field-Effect Transistors by Intentionally Changing Process Conditions and Using Takeuchi Plot
T. Tsunomura, F. Yano, A. Nishida, T. Hiramoto
20105 citations
Semantic Scholar
Failure Analysis System for Submicron Semiconductor Devices
M. Fukui, Y. Mitsui, D. Ph., Yasuhiko Nara +2 more
20065 citations
Semantic Scholar
Role of ozone in reactive coevaporation of lead zirconate titanate thin films
K. Torii, F. Yano, Y. Fujisaki
19984 citations
Semantic Scholar
Predoping effects of boron and phosphorous on arsenic diffusion along grain boundaries in polycrystalline silicon investigated by atom probe tomography
H. Takamizawa, Y. Shimizu, K. Inoue, Y. Nozawa +5 more
20163 citations
Semantic Scholar
Erratum: ‘‘Nitridation process of sapphirre substrate surface and its effect on the growth of GaN’’ [J. Appl. Phys. 79, 3487 (1996)]
K. Uchida, A. Watanabe, F. Yano, M. Kouguchi +2 more
19963 citations
Semantic Scholar
Tip-to-Sample Distance Dependence of dC/dZ Imaging in Thin Dielectric Film Measurement
Y. Naitou, A. Ando, H. Ogiso, S. Kamohara +2 more
20082 citations
Semantic Scholar
Effect of Al, Cr, or Ru Addition on Corrosion Resistance of Fe-Ta-C Magnetic Thin Films
F. Kirino, Shigekazu Ohotomo, N. Koiso, F. Yano
19962 citations Open access
Semantic Scholar
Blocking of deuterium diffusion in poly-Si/Al2O3/HfxSi1−xO2/SiO2 high-k stacks as evidenced by atom probe tomography
Y. Tu, Bing Han, Y. Shimizu, Y. Kunimune +7 more
20181 citations
Semantic Scholar
Three-Dimensional Structure Analysis of Metal–Oxide–Insulator Field Effect Transistors with Different Electrical Properties by Scanning Transmission Electron Microscopy
S. Ono, M. Yamane, H. Okushima, M. Koguchi +6 more
20111 citations
Semantic Scholar
Correlation Between Surface Topography and Static Capacitance Image of Ultrathin SiO2 Films Evaluated by Scanning Capacitance Microscopy
Y. Naitou, A. Ando, H. Ogiso, S. Kamohara +3 more
20071 citations Open access
Semantic Scholar
X-Ray Photoelectron Spectroscopy Study of Native Oxidation on Misoriented Si(100)
F. Yano, T. Itoga, Keiichi Kanehori
19971 citations
Semantic Scholar
Detection of Electron- and Hole-traps in SiO 2 /Si by ESCA
S. Iwata, N. Yamamoto, F. Yano
19961 citations Open access
Semantic Scholar
Ultra-thin fatigue free lead zirconate titanate thin films for gigabit DRAMs
Kazuyoshi Torii, H. Kawakami, K. Kushida, F. Yano +1 more
19951995 Symposium on VLSI Technology. Digest of Technical Papers1 citations
Semantic Scholar
XPS study of sub-monolayer native oxide on HF-treated Si Surfaces
F. Yano, A. Hiraoka, T. Itoga, H. Kojima +2 more
19941 citations
Semantic Scholar
Hydrogen Distribution Analysis in Al 2 O 3 Film -Dependence of Annealing Temperature-
Y. Shimizu, Bing Han, Y. Tu, K. Inoue +7 more
20160 citations
Semantic Scholar
Dopant Drive-in Path Analysis in Poly-silicon Filled in Trench type 3D-MOSFET using Atom Probe Tomography
K. Inoue, H. Takamizawa, Y. Shimizu, Bing Han +5 more
20140 citations
Semantic Scholar
Dopant Distribution in Trench Polysilicon by Atom Probe Tomography
F. Yano
20130 citations
Semantic Scholar
Elemental Distribution Analysis of Semiconductor Nanostructures with Atom Probe Tomography
Y. Shimizu, K. Inoue, H. Takamizawa, F. Yano +1 more
20130 citations Open access
Semantic Scholar
Top-view imaging of 65nm gate length metal-oxide-semiconductor field effect transistors by scanning capacitance microscopy
Y. Naitou, A. Ando, H. Ogiso, S. Kamohara +2 more
20070 citations
Semantic Scholar
composition and chemical shift analysis at SiO_xN_y/Si interface using spatially-resolved EELS
T. Aoyama, K. Kimoto, K. Ueda, F. Yano +1 more
19990 citations
Semantic Scholar
Current Status and Future Trend of Analytical Instruments for Failure Analyses in Si Process
Y. Mitsui, F. Yano, H. Kakibayashi, T. Aoyama
19990 citations
Semantic Scholar

Frequent co-authors

Invite them to SciRah by sharing their profile.

Y. Nagai×19
Invite
Y. Nagai — researcher profile on SciRah
A. Nishida×17
Invite
A. Nishida — researcher profile on SciRah
Y. Shimizu×16
Invite
Y. Shimizu — researcher profile on SciRah
H. Takamizawa×15
Invite
H. Takamizawa — researcher profile on SciRah

×14

Invite

K. Inoue — researcher profile on SciRah

Invite

Y. Mitsui — researcher profile on SciRah

Invite

T. Toyama — researcher profile on SciRah

Invite

M. Inoue — researcher profile on SciRah

T. Tsunomura×6

Invite

T. Tsunomura — researcher profile on SciRah

Invite

T. Mogami — researcher profile on SciRah

Invite

T. Itoga — researcher profile on SciRah

Keiichi Kanehori×5

Invite

Keiichi Kanehori — researcher profile on SciRah