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T. Yoda · SciRah

Researcher profile · Semantic Scholar

T. Yoda

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T. Yoda — researcher profile on SciRah

h-index: 7
Works: 39
Citations: 526

Most-cited papers

Self-assembly of a silica–surfactant nanocomposite in a porous alumina membrane
A. Yamaguchi, Fumiaki Uejo, T. Yoda, T. Uchida +3 more
2004Nature Materials400 citations
Semantic Scholar
Properties of High-Performance Porous SiOC Low-k Film Fabricated Using Electron-Beam Curing
T. Yoda, K. Fujita, H. Miyajima, R. Nakata +2 more
200521 citations
Semantic Scholar
Diffusivities of Tris(2,2′-bipyridyl)ruthenium inside Silica- Nanochannels Modified with Alkylsilanes
A. Yamaguchi, T. Yoda, Shintaro T. Suzuki, Kotaro Morita +1 more
2006Analytical Sciences18 citations Open access
Semantic Scholar
Structural Studies of High-Performance Low-k Dielectric Materials Improved by Electron-Beam Curing
T. Yoda, Y. Nakasaki, H. Hashimoto, K. Fujita +5 more
200515 citations Open access
Semantic Scholar
High-reliability tungsten-stacked via process with fully converted TiAl/sub 3/ formation annealing
R. Shohji, M. Uda, T. Nakamura, T. Yoda +1 more
199913 citations
Semantic Scholar
Challenge of low-k materials for 130, 90, 65 nm node interconnect technology and beyond
Hideshi Miyajima, K. Watanabe, K. Fujita, S. Ito +20 more
2004IEDM Technical Digest. IEEE International Electron Devices Meeting, 2004.11 citations
Semantic Scholar
Development of a planarized Al-Si contact filling technology
H. Ono, Y. Ushiku, T. Yoda
1990Seventh International IEEE Conference on VLSI Multilevel Interconnection9 citations
Semantic Scholar
High-Performance SiOF Film Fabricated Using a Dual-Frequency-Plasma Chemical Vapor Deposition system
T. Yoda, K. Fujita, H. Miyajima, R. Nakata +3 more
20047 citations Open access
Semantic Scholar
The application of simultaneous ebeam cure methods for 65 nm node Cu/low-k technology with hybrid (PAE/MSX) structure
H. Miyajima, K. Fujita, R. Nakata, T. Yoda +1 more
2004Proceedings of the IEEE 2004 International Interconnect Technology Conference (IEEE Cat. No.04TH8729)6 citations
Semantic Scholar
Stranski–Krastanov Growth of Tungsten during Chemical Vapor Deposition Revealed by Micro-Auger Electron Spectroscopy
S. Noda, T. Tsumura, Jota Fukuhara, T. Yoda +2 more
20045 citations Open access
Semantic Scholar
Vacancy-type defects in AlInN/AlN/GaN structures probed by monoenergetic positron beam
A. Uedono, Y. Kimura, T. Hoshii, K. Kakushima +6 more
2023Journal of Applied Physics4 citations
Semantic Scholar
First-principles and thermodynamic analysis for gas phase reactions and structures of the SiC(0001) surface under conventional CVD and Halide CVD environments
K. Chokawa, Y. Daigo, I. Mizushima, T. Yoda +1 more
2021Japanese Journal of Applied Physics3 citations Open access
Semantic Scholar
Advanced BEOL Technology Overview
T. Yoda, H. Miyajima
20093 citations
Semantic Scholar
Investigation of Cu ion drift through CVD TiSiN into SiO2 under bias temperature stress conditions
T. Kawanoue, S. Omoto, M. Hasunuma, T. Yoda
2005IEICE Electronics Express3 citations Open access
Semantic Scholar
High-Performance Low-k Dielectric Using Advanced EB-Cure Process
M. Shimada, H. Miyajima, R. Nakata, T. Yoda
20013 citations
Semantic Scholar
Design and fabrication results of Z-gate layout MOSFETs for radiation hardness integrated circuit
Kaito Kuroki, Arisa Kimura, K. Hirakawa, Masayuki Iwase +4 more
2023Japanese Journal of Applied Physics1 citations
Semantic Scholar
Two-pads per electrode in-situ test structure for micron-scale flip-chip bonding reliability of chip-on-chip device
Yusuke Ebihara, Ayako Mizushima, T. Yoda, K. Hirakawa +5 more
2022International Conference on Microelectronic Test Structures1 citations
Semantic Scholar
Dependence of total ionizing dose effect of nMOS transistors on the on/off duty ratio of a gate voltage
Munehiro Ogasawara, Ryoichiro Yoshida, Y. Oshima, Motoki Ando +7 more
2021Japanese Journal of Applied Physics1 citations Open access
Semantic Scholar
Comparison between UV and EB cure method for porous PAr / porous MSX hybrid structure
K. Fujita, H. Miyajima, S. Nakao, T. Sakanaka +3 more
20051 citations
Semantic Scholar
X-ray absorption studies of high performance Low-k dielectric materials
T. Yoda, H. Miyajima, M. Shimada, R. Nakata +1 more
20021 citations
Semantic Scholar
Simulation of a ring oscillator operation during γ-ray irradiation using the TID response model of MOSFETs and its experimental verification
Arisa Kimura, Kaito Kuroki, Ryoichiro Yoshida, K. Hirakawa +5 more
2023Japanese Journal of Applied Physics0 citations
Semantic Scholar
Eﬀects and Causes of (cid:13) -ray Irradiation on CMOS Logic Circuits with Diﬀerent P-type and N-type MOSFET Size Ratios
Arisa Kimura, Kaito Kuroki, Ryoichiro Yoshida, Motoki Ando +8 more
20230 citations
Semantic Scholar
Total ionizing dose effect on 2-D array data transfer ICs designed and fabricated by 0.18 μm CMOS technology
T. Yoda, N. Ishihara, Y. Oshima, Motoki Ando +9 more
2022Japanese Journal of Applied Physics0 citations Open access
Semantic Scholar
Carrier transport characteristics depending on AlN spacer layer thickness on InAlN/GaN heterostructure
Yasuki Kimura, T. Hoshii, K. Miyano, S. Nunoue +6 more
20200 citations
Semantic Scholar
Prediction of gas phase reactions and surface structures under the CVD process of SiC with HCl gas
K. Chokawa, Y. Daigo, I. Mizushima, T. Yoda +1 more
20200 citations
Semantic Scholar
Categorization and structure analysis of pits generated during GaN growth on Si substrates
K. Okamoto, T. Soga, M. Deura, T. Yoda +7 more
20200 citations
Semantic Scholar
Comparison of Gate Bias Characteristics of MOSFETs at High TID
Ryoichiro Yoshida, Arisa Kimura, Motoki Ando, Y. Oshima +7 more
20200 citations
Semantic Scholar
Development of dynamic deterioration model of MOSFET under TID effect
Y. Oshima, Motoki Ando, K. Hirakawa, Masayuki Iwase +4 more
20190 citations
Semantic Scholar
Analysis on mechanism of generation and extinguishment of pits during GaN growth on Si substrates
M. Deura, T. Soga, K. Okamoto, T. Momose +7 more
20190 citations
Semantic Scholar
Development of MOSFET model under TID effect
Y. Oshima, Motoki Ando, Ryoichiro Yoshida, K. Hirakawa +5 more
20190 citations
Semantic Scholar
Origin and suppression of critical deep pit in high-electron-mobility transistor structure using GaN on Si technology with strained-layer superlattice
K. Miyano, Masayuki Tsukui, Hajime Nago, Y. Iyechika +5 more
2018Japanese Journal of Applied Physics0 citations Open access
Semantic Scholar
New technologies Application of OpenFOAM in Product Development Phase
T. Kawamura, H. Shiozawa, M. Sano, T. Yoda +7 more
20170 citations
Semantic Scholar
The sprint process of Al interconnects with low-temperature PVD via filling
T. Yoda, H. Ezawa, K. Tsutsumi, M. Honda
2004IEICE Electronics Express0 citations Open access
Semantic Scholar
Electrochemical Study of Model Additives on Aluminum Single-Crystal Surfaces
T. Yoda, Y. Matsui
20030 citations Open access
Semantic Scholar
Film Properties of High-Performance FSG Films
T. Yoda, H. Miyajima, K. Fujita, R. Nakata +1 more
20010 citations
Semantic Scholar
Reduction of PFC emissions by gas circulation cleaning in plasma CVD
R. Nakata, H. Kubota, Naruhiko Kaji, I. Sakai +2 more
20012001 IEEE International Symposium on Semiconductor Manufacturing. ISSM 2001. Conference Proceedings (Cat. No.01CH37203)0 citations
Semantic Scholar
The most effective method for reducing PFC emissions caused by PECVD cleaning using the chamber impedance monitor
T. Yoda, M. Shimizu
2000Proceedings of ISSM2000. Ninth International Symposium on Semiconductor Manufacturing (IEEE Cat. No.00CH37130)0 citations
Semantic Scholar
Successful Percentages of Embedding Subsystems into Hypercubes
H. Masuyama, T. Yoda
19980 citations
Semantic Scholar
Gamma-ray Compton profiles for Fe-Ti and Fe-Ti-H amorphous alloys
F. Itoh, T. Yoda, Kenji Suzuki
19880 citations
Semantic Scholar

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