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K. Kato · SciRah

Researcher profile · Semantic Scholar

K. Kato

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K. Kato — researcher profile on SciRah

h-index: 14
Works: 136
Citations: 652

Most-cited papers

Programming Nanoparticles in Multiscale: Optically Modulated Assembly and Phase Switching of Silicon Nanoparticle Array.
Le-Tian Wang, Y. Rho, Wan Shou, Sukjoon Hong +7 more
2018ACS Nano37 citations
Semantic Scholar
There's plenty of room at the top
T. Liu, U. Sikder, K. Kato, V. Stojanović
2017IEEE/LEOS International Conference on Optical MEMS31 citations
Semantic Scholar
Effects of ZrO2/Al2O3 Gate-Stack on the Performance of Planar-Type InGaAs TFET
D. Ahn, Sanghee Yoon, K. Kato, Taiichiro Fukui +2 more
2019IEEE Transactions on Electron Devices25 citations
Semantic Scholar
Stabilized formation of tetragonal ZrO2 thin film with high permittivity
K. Kato, Takatoshi Saito, S. Shibayama, M. Sakashita +4 more
201423 citations
Semantic Scholar
Experimental observation of type-I energy band alignment in lattice-matched Ge1−x−ySixSny/Ge heterostructures
T. Yamaha, S. Shibayama, T. Asano, K. Kato +4 more
201622 citations
Semantic Scholar
Formation of high-quality oxide/Ge1−xSnx interface with high surface Sn content by controlling Sn migration
K. Kato, N. Taoka, T. Asano, T. Yoshida +3 more
201419 citations
Semantic Scholar
Non-Volatile Nano-Electro-Mechanical Memory for Energy-Efficient Data Searching
K. Kato, V. Stojanović, T. Liu
2016IEEE Electron Device Letters17 citations
Semantic Scholar
p-Channel TFET Operation of Bilayer Structures With Type-II Heterotunneling Junction of Oxide- and Group-IV Semiconductors
K. Kato, K. Jo, H. Matsui, H. Tabata +5 more
2020IEEE Transactions on Electron Devices15 citations
Semantic Scholar
Thermal properties of III–V on a SiC platform for photonic integrated circuits
T. Sanjoh, N. Sekine, K. Kato, S. Takagi +1 more
2019Japanese Journal of Applied Physics15 citations Open access
Semantic Scholar
A Novel Gate-Normal Tunneling Field-Effect Transistor With Dual-Metal Gate
S. Glass, K. Kato, L. Kibkalo, J. Hartmann +4 more
2018IEEE Journal of the Electron Devices Society14 citations Open access
Semantic Scholar
Impact of La2O3/InGaAs MOS interface on InGaAs MOSFET performance and its application to InGaAs negative capacitance FET
C.-Y. Chang, K. Endo, K. Kato, C. Yokoyama +2 more
2016International Electron Devices Meeting14 citations
Semantic Scholar
Improvement of SiGe MOS interface properties with a wide range of Ge contents by using TiN/Y2O3 gate stacks with TMA nassivation
Terrell R. Lee, K. Kato, M. Ke, M. Takenaka +1 more
2019Symposium on VLSI Technology13 citations
Semantic Scholar
Bilayer tunneling field effect transistor with oxide-semiconductor and group-IV semiconductor hetero junction: Simulation analysis of electrical characteristics
K. Kato, H. Matsui, H. Tabata, M. Takenaka +1 more
2019AIP Advances13 citations Open access
Semantic Scholar
Impacts of AlGeO formation by post thermal oxidation of Al2O3/Ge structure on interfacial properties
S. Shibayama, K. Kato, M. Sakashita, W. Takeuchi +3 more
201413 citations
Semantic Scholar
Electrical characteristic of atomic layer deposition La2O3/Si MOSFETs with ferroelectric-type hysteresis
K. Endo, K. Kato, M. Takenaka, S. Takagi
2019Japanese Journal of Applied Physics12 citations
Semantic Scholar
Embedded Nano-Electro-Mechanical Memory for Energy-Efficient Reconfigurable Logic
K. Kato, V. Stojanović, T. Liu
2016IEEE Electron Device Letters12 citations Open access
Semantic Scholar
Effect of Conduction Band Edge States on Coulomb-Limiting Electron Mobility in Cryogenic MOSFET Operation
H. Oka, Takumi Inaba, S. Iizuka, H. Asai +2 more
20222022 IEEE Symposium on VLSI Technology and Circuits (VLSI Technology and Circuits)11 citations
Semantic Scholar
ZnO/Si and ZnO/Ge bilayer tunneling field effect transistors: Experimental characterization of electrical properties
K. Kato, H. Matsui, H. Tabata, M. Takenaka +1 more
2019Journal of Applied Physics11 citations
Semantic Scholar
Influence of impurity concentration in Ge sources on electrical properties of Ge/Si hetero-junction tunneling field-effect transistors
T. Bae, K. Kato, Ryota Suzuki, R. Nakane +2 more
2018Applied Physics Letters11 citations
Semantic Scholar
TiN/Al2O3/ZnO gate stack engineering for top-gate thin film transistors by combination of post oxidation and annealing
K. Kato, H. Matsui, H. Tabata, M. Takenaka +1 more
201811 citations
Semantic Scholar
Determining the low-frequency noise source in cryogenic operation of short-channel bulk MOSFETs
Takumi Inaba, H. Oka, H. Asai, H. Fuketa +5 more
20232023 IEEE Symposium on VLSI Technology and Circuits (VLSI Technology and Circuits)10 citations
Semantic Scholar
Metal–oxide–semiconductor interface properties of TiN/Y2O3/Si0.62Ge0.38 gate stacks with high temperature post-metallization annealing
Tsung-En Lee, M. Ke, K. Kato, M. Takenaka +1 more
202010 citations
Semantic Scholar
Interface properties of Al2O3/Ge structures with thin Ge oxide interfacial layer formed by pulsed metal organic chemical vapor deposition
T. Yoshida, K. Kato, S. Shibayama, M. Sakashita +4 more
201410 citations Open access
Semantic Scholar
Oxygen and germanium migration at low temperature influenced by the thermodynamic nature of the materials used in germanium metal-insulator-semiconductor structures
K. Kato, N. Taoka, M. Sakashita, O. Nakatsuka +1 more
20159 citations
Semantic Scholar
Fabrication of thin body InAs-on-insulator structures by Smart Cut method with H+ implantation at room temperature
K. Sumita, K. Kato, M. Takenaka, S. Takagi
2019Japanese Journal of Applied Physics8 citations
Semantic Scholar
Characterization and understanding of slow traps in GeOx-based n-Ge MOS interfaces
M. Ke, P. Cheng, K. Kato, M. Takenaka +1 more
2018International Electron Devices Meeting8 citations
Semantic Scholar
Tilted ion implantation as a cost-efficient sublithographic patterning technique
Sang Wan Kim, P. Zheng, K. Kato, L. Rubin +1 more
20168 citations
Semantic Scholar
Formation of chemically stable GeO2 on the Ge surface with pulsed metal–organic chemical vapor deposition
S. Shibayama, T. Yoshida, K. Kato, M. Sakashita +4 more
20158 citations
Semantic Scholar
Robustness of Sn precipitation during thermal oxidation of Ge1−xSnx on Ge(001)
K. Kato, T. Asano, N. Taoka, M. Sakashita +3 more
20148 citations Open access
Semantic Scholar
RF reflectometry for readout of charge transition in a physically defined p-channel MOS silicon quantum dot
Sinan Bugu, S. Nishiyama, K. Kato, Yong-Xun Liu +2 more
2020Japanese Journal of Applied Physics7 citations Open access
Semantic Scholar
Fabrication and Electrical Characteristics of ZnSnO/Si Bilayer Tunneling Filed-Effect Transistors
K. Kato, H. Matsui, H. Tabata, M. Takenaka +1 more
2019IEEE Journal of the Electron Devices Society7 citations Open access
Semantic Scholar
Proposal and demonstration of oxide-semiconductor/(Si, SiGe, Ge) bilayer tunneling field effect transistor with type-II energy band alignment
K. Kato, H. Matsui, H. Tabata, Mitsuru Takenaka +1 more
2017International Electron Devices Meeting7 citations
Semantic Scholar
Modulation of sub-threshold properties of InGaAs MOSFETs by La2O3 gate dielectrics
C.-Y. Chang, K. Endo, K. Kato, M. Takenaka +1 more
20177 citations Open access
Semantic Scholar
Enhanced patterning by tilted ion implantation
Sang Wan Kim, P. Zheng, K. Kato, L. Rubin +1 more
2016SPIE Advanced Lithography7 citations
Semantic Scholar
Electron beam lithography with negative tone resist for highly integrated silicon quantum bits
K. Kato, Yong-Xun Liu, Shigenori Murakami, Y. Morita +1 more
2021Nanotechnology6 citations
Semantic Scholar
Source engineering for bilayer tunnel field-effect transistor with hetero tunnel junction: thickness and impurity concentration
K. Kato, T. Mori, Y. Morita, T. Matsukawa +2 more
2020Applied Physics Express6 citations
Semantic Scholar
Impact of metal gate electrodes on electrical properties of Y2O3/Si0.78Ge0.22 gate stacks
Tsung-En Lee, K. Kato, M. Ke, K. Toprasertpong +2 more
2019Microelectronic Engineering6 citations Open access
Semantic Scholar
Sub-lithographic Patterning via Tilted Ion Implantation for Scaling Beyond the 7-nm Technology Node
P. Zheng, Sang Wan Kim, D. Connelly, K. Kato +3 more
2017IEEE Transactions on Electron Devices6 citations Open access
Semantic Scholar
Device structure and fabrication process for silicon spin qubit realizing process-variation-robust SWAP gate operation
H. Asai, S. Iizuka, T. Mogami, J. Hattori +5 more
2023Japanese Journal of Applied Physics5 citations Open access
Semantic Scholar
Introduction of deep level impurities, S, Se, and Zn, into Si wafers for high-temperature operation of a Si qubit
Yoshisuke Ban, K. Kato, S. Iizuka, Shigenori Murakami +4 more
2022Japanese Journal of Applied Physics5 citations Open access
Semantic Scholar
Accurate evaluation of specific contact resistivity between InAs/Ni–InAs alloy using a multi-sidewall transmission line method
K. Sumita, K. Kato, J. Takeyasu, K. Toprasertpong +2 more
2020Japanese Journal of Applied Physics5 citations Open access
Semantic Scholar
Improvement in Electrical Characteristics of ZnSnO/Si Bilayer TFET by W/Al₂O₃ Gate Stack
K. Kato, H. Matsui, H. Tabata, T. Mori +4 more
2020IEEE Journal of the Electron Devices Society5 citations Open access
Semantic Scholar
Re-examination of effects of sulfur treatment on Al2O3/InGaAs metal-oxide-semiconductor interface properties
S. Yoon, K. Kato, C. Yokoyama, D. Ahn +2 more
2019Journal of Applied Physics5 citations
Semantic Scholar
Importance of control of oxidant partial pressure on structural and electrical properties of Pr-oxide films
K. Kato, M. Sakashita, W. Takeuchi, N. Taoka +2 more
20145 citations
Semantic Scholar
Impact of Switching Voltage on Complementary Steep-Slope Tunnel Field Effect Transistor Circuits
K. Kato, T. Tanamoto, T. Mori, Y. Morita +3 more
2020IEEE Transactions on Electron Devices4 citations
Semantic Scholar
Invited) Challenges and Developments in GeSn Process Technology for Si Nanoelectronics
S. Zaima, O. Nakatsuka, N. Taoka, K. Kato +2 more
20144 citations
Semantic Scholar
Development of Integrated Device Simulator for Quantum Bit Design: Self-consistent Calculation for Quantum Transport and Qubit Operation
H. Asai, S. Iizuka, T. Ikegami, J. Hattori +5 more
2021IEEE Electron Devices Technology and Manufacturing Conference3 citations
Semantic Scholar
Mechanism of extraordinary gate-length dependence of quantum dot operation in isoelectronic-trap-assisted tunnel FETs
S. Iizuka, H. Asai, K. Kato, J. Hattori +2 more
2020Applied Physics Express3 citations Open access
Semantic Scholar
(Invited) Ultrathin-Body Ge-on-Insulator MOSFET and TFET Technologies
S. Takagi, Wu-Kang Kim, K. Jo, R. Matsumura +5 more
2018ECS Transactions3 citations Open access
Semantic Scholar
4.2 K sensitivity-tunable radio frequency reflectometry of a physically defined p-channel silicon quantum dot
Sinan Bugu, S. Nishiyama, K. Kato, Yong-Xun Liu +4 more
2021Scientific Reports2 citations Open access
Semantic Scholar

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