C. Blair

Most-cited papers

1. A Room Temperature 0.1 /spl mu/m CMOS on SOI

   G. Shahidi, C. Blair, K. Beyer, T. Bucelot +25 more

   1993Symposium on VLSI Technology76 citations

   Semantic Scholar

   Save

2. Indium channel implant for improved short-channel behavior of submicrometer NMOSFETs

   Ghavam G. Shahidi, B. Davari, T. Bucelot, P. A. Ronsheim +5 more

   1993IEEE Electron Device Letters75 citations

   Semantic Scholar

   Save

3. A High Performance 0.25/spl mu/m CMOS

   C. G. Shahidi, J. Warnock, A. Acovic, P. Agnello +24 more

   1993Symposium on VLSI Technology33 citations

   Semantic Scholar

   Save

4. Electron‐beam lithography for advanced device prototyping: Process tool metrology

   M. Rosenfield, M. Thomson, P. Coane, K. Kwietniak +7 more

   199316 citations

   Semantic Scholar

   Save

5. Single layer chemically amplified resist processes for device fabrication by x‐ray lithography

   D. Seeger, R. Viswanathan, C. Blair, J. Gelorme +1 more

   19921 citations

   Semantic Scholar

   Save

6. Mixed e-beam/optical lithography process for the fabrication of sub-0.25-um poly gates

   K. Kwietniak, M. Rosenfield, P. Coane, C. Blair +1 more

   1993Advanced Lithography0 citations

   Semantic Scholar

   Save