T. Akin

Most-cited papers

An Automatically Mode-Matched MEMS Gyroscope With Wide and Tunable Bandwidth
Soner Sonmezoglu, S. E. Alper, T. Akin
2014Journal of microelectromechanical systems132 citations Open access
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Effect of pattern size and geometry on the use of Cassie–Baxter equation for superhydrophobic surfaces
C. Cansoy, H. Erbil, O. Akar, T. Akin
2011125 citations Open access
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A tunable multi-band metamaterial design using micro-split SRR structures.
E. Ekmekci, K. Topalli, T. Akin, G. Turhan‐Sayan
2009Optics Express110 citations Open access
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A new design and a fabrication approach to realize a high performance three axes capacitive MEMS accelerometer
Akin Aydemir, Yunus Terzioglu, T. Akin
201677 citations Open access
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A Bulk-Micromachined Three-Axis Capacitive MEMS Accelerometer on a Single Die
S. Tez, Ulas Aykutlu, M. Torunbalci, T. Akin
2015Journal of microelectromechanical systems73 citations Open access
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Wafer level hermetic sealing of MEMS devices with vertical feedthroughs using anodic bonding
M. Torunbalci, S. E. Alper, T. Akin
201560 citations Open access
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Design and fabrication of a high performance resonant MEMS temperature sensor
Talha Kose, K. Azgın, T. Akin
201640 citations Open access
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Advanced MEMS Process for Wafer Level Hermetic Encapsulation of MEMS Devices Using SOI Cap Wafers With Vertical Feedthroughs
M. Torunbalci, S. E. Alper, T. Akin
2015Journal of microelectromechanical systems40 citations Open access
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A 15–40-GHz Frequency Reconfigurable RF MEMS Phase Shifter
Mehmet Unlu, S. Demir, T. Akin
2013IEEE transactions on microwave theory and techniques36 citations Open access
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A New Temperature-Tolerant RF MEMS Switch Structure Design and Fabrication for Ka-Band Applications
K. Demirel, E. Yazgan, S. Demir, T. Akin
2016Journal of microelectromechanical systems32 citations Open access
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Temperature compensation of a capacitive MEMS accelerometer by using a MEMS oscillator
Talha Kose, K. Azgın, T. Akin
20162016 IEEE International Symposium on Inertial Sensors and Systems27 citations Open access
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A Bulk-Micromachined Fully Differential MEMS Accelerometer With Split Interdigitated Fingers
Osman Aydin, T. Akin
2013IEEE Sensors Journal27 citations Open access
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Plasma-activated direct bonding of diamond-on-insulator wafers to thermal oxide grown silicon wafers
B. Bayram, O. Akar, T. Akin
201027 citations Open access
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Atomic‐layer‐deposited zinc oxide as tunable uncooled infrared microbolometer material
Enes Battal, S. Bolat, M. Tanrikulu, A. Okyay +1 more
201424 citations Open access
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Comparison of Two Alternative Silicon-on-Glass Microfabrication Processes for MEMS Inertial Sensors
M. Torunbalci, Erdinç Tatar, S. E. Alper, T. Akin
201123 citations Open access
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A capacitive MEMS accelerometer readout with concurrent detection and feedback using discrete components
Yunus Terzioglu, S. E. Alper, K. Azgın, T. Akin
20142014 IEEE/ION Position, Location and Navigation Symposium - PLANS 201420 citations Open access
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An All-Silicon Process Platform for Wafer-Level Vacuum Packaged MEMS Devices
M. Torunbalci, H. D. Gavcar, F. Yeşil, S. E. Alper +1 more
2021IEEE Sensors Journal19 citations Open access
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Fabrication of a sandwich type three axis capacitive MEMS accelerometer
S. Tez, T. Akin
2013Italian National Conference on Sensors18 citations Open access
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A method and electrical model for the anodic bonding of SOI and glass wafers
Erdinç Tatar, M. Torunbalci, S. E. Alper, T. Akin
2012IEEE/LEOS International Conference on Optical MEMS17 citations Open access
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A fourth order unconstrained ΣΔ capacitive accelerometer
Ugur Sonmez, H. Kulah, T. Akin
2011International Solid-State Sensors, Actuators and Microsystems Conference16 citations Open access
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A feasibility study for tunable metamaterial design using multi-Split SRR structures and RF MEMS switching
E. Ekmekci, K. Topalli, T. Akin, G. Turhan‐Sayan
2009IEEE Antennas and Propagation Society International Symposium16 citations Open access
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Wafer level hermetic encapsulation of MEMS inertial sensors using SOI cap wafers with vertical feedthroughs
M. Torunbalci, S. E. Alper, T. Akin
20142014 International Symposium on Inertial Sensors and Systems (ISISS)15 citations Open access
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Microwave Characterization of a Wafer-Level Packaging Approach for RF MEMS Devices Using Glass Frit Bonding
Ilker Comart, K. Topalli, S. Demir, T. Akin
2014IEEE Sensors Journal15 citations Open access
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Capturing and detection of MCF-7 breast cancer cells with a CMOS image sensor
Javid Musayev, Caglar Altiner, Yekbun Adiguzel, H. Kulah +2 more
201414 citations Open access
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Wafer-Level Low-Temperature Solid-Liquid Inter-Diffusion Bonding With Thin Au-Sn Layers for MEMS Encapsulation
O. Temel, Y. E. Kalay, T. Akin
2021Journal of microelectromechanical systems13 citations Open access
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Low-Cost LWIR-Band CMOS Infrared (CIR) Microbolometers for High Volume Applications
T. Akin
2020IEEE/LEOS International Conference on Optical MEMS13 citations Open access
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Numerical and Experimental Investigation into LWIR Transmission Performance of Complementary Silicon Subwavelength Antireflection Grating (SWARG) Structures
Ramazan Cetin, T. Akin
2019Scientific Reports13 citations Open access
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Light Trapping by Micro and Nano-hole Texturing of Single-crystalline Silicon Solar Cells☆
Serra Altinoluk, Hande Ciftpinar, O. Demircioglu, F. Es +6 more
201613 citations Open access
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Self-Packaged Three Axis Capacitive Mems Accelerometer
Akin Aydemir, T. Akin
2020IEEE/LEOS International Conference on Optical MEMS12 citations Open access
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A method for wafer level hermetic packaging of SOI-MEMS devices with embedded vertical feedthroughs using advanced MEMS process
M. Torunbalci, S. E. Alper, T. Akin
201512 citations Open access
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A miniature low-cost LWIR camera with a 160×120 microbolometer FPA
Murat Tepegoz, Alper Kucukkomurler, Firat Tankut, S. Eminoglu +1 more
2014Defense + Security Symposium12 citations Open access
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A plasmonically enhanced pixel structure for uncooled microbolometer detectors
Ozan Erturk, Enes Battal, Seniz E. Kucuk, A. Okyay +1 more
2013Defense, Security, and Sensing12 citations Open access
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A simple out-of-plane capacitive MEMS accelerometer utilizing lateral and vertical electrodes for differential sensing
Yunus Terzioglu, Talha Kose, K. Azgın, T. Akin
2015Italian National Conference on Sensors11 citations Open access
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Beam switching reflectarray with MEMS controls
Omer Bayraktar, O. Civi, T. Akin
2010Proceedings of the Fourth European Conference on Antennas and Propagation11 citations
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A folded leg Ka-band RF MEMS shunt switch with amorphous silicon (a-Si) sacrificial layer
K. Demirel, E. Yazgan, S. Demir, T. Akin
201710 citations Open access
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An 80x80 microbolometer type thermal imaging sensor using the LWIR-band CMOS infrared (CIR) technology
Firat Tankut, Mustafa H. Cologlu, Hıdır Aşkar, Hande Ozturk +7 more
2017Defense + Security10 citations Open access
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A single-mass self-resonating closed-loop capacitive MEMS accelerometer
Talha Kose, Yunus Terzioglu, K. Azgın, T. Akin
2016Italian National Conference on Sensors10 citations Open access
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Fabrication of a three-axis capacitive MEMS accelerometer on a single substrate
Akin Aydemir, T. Akin
2015Italian National Conference on Sensors10 citations Open access
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A 1280×1024-15μm CTIA ROIC for SWIR FPAs
S. Eminoglu, M. Isikhan, Nusret Bayhan, M. Gulden +8 more
2015Defense + Security Symposium10 citations Open access
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Gold-tin eutectic bonding for hermetic packaging of MEMS devices with vertical feedthroughs
M. Torunbalci, E. Demir, I. Donmez, S. E. Alper +1 more
2014IEEE Sensors. Proceedings10 citations Open access
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Realization of Single Layer Microbolometer Detector Pixel Using ZnO Material
M. Tanrikulu, Ç. Yildizak, A. Okyay, O. Akar +2 more
2020IEEE Sensors Journal9 citations Open access
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Development and Modeling of a Wafer-Level BCB Packaging Method for Capacitive RF MEMS Switches
Ilker Comart, Ç. Çetintepe, Ebru Sağıroğlu, S. Demir +1 more
2019Journal of microelectromechanical systems9 citations Open access
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MT6415CA: a 640×512-15µm CTIA ROIC for SWIR InGaAs detector arrays
S. Eminoglu, M. Isikhan, Nusret Bayhan, M. Gulden +5 more
2013Defense, Security, and Sensing9 citations Open access
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A detailed analysis for the absorption coefficient of multilevel uncooled infrared detectors
Seniz E. Kucuk, M. Tanrikulu, T. Akin
2011Defense + Commercial Sensing9 citations Open access
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A new baseband equivalent model for sense mode dynamics and its effects on force-feedback controller design for MEMS gyroscopes
B. Eminoglu, S. E. Alper, T. Akin
2011IEEE Sensors. Proceedings9 citations Open access
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A ΣΔ micro accelerometer with 6 µg/√Hz resolution and 130 dB dynamic range
Uğur Sönmez, H. Külah, T. Akin
20148 citations Open access
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MT6425CA: a 640 x 512-25μm CTIA ROIC for SWIR InGaAs detector arrays
S. Eminoglu, Y. Mahsereci, Caglar Altiner, T. Akin
2012Defense + Commercial Sensing8 citations Open access
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A high performance Σ-Δ readout circuitry for μg resolution microaccelerometers
I. Ocak, R. Kepenek, H. Kulah, T. Akin
20108 citations Open access
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A single mass two-axis capacitive MEMS accelerometer with force rebalance
Talha Kose, Yunus Terzioglu, K. Azgın, T. Akin
2015Proceedings7 citations Open access
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A fabrication process based on structural layer formation using Au–Au thermocompression bonding for RF MEMS capacitive switches and their performance
Ç. Çetintepe, E. S. Topalli, S. Demir, O. Civi +1 more
2014International journal of microwave and wireless technologies7 citations Open access
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