A new design and a fabrication approach to realize a high performance three axes capacitive MEMS accelerometer

Akin Aydemir^a✉, Yunus Terzioğlu^{a b}, Tayfun Akın^{a b}

1. ^aMETU-MEMS Research and Applications Center, Middle East Technical University, Ankara, Turkey
2. ^bElectrical and Electronics Engineering Department, Middle East Technical University, Ankara, Turkey
3. ✉Corresponding author