E. Rohkamm

Most-cited papers

1. Characterization of a broad beam Kaufman-type ion source operated with CHF3 and O2

   Gregor Dornberg, E. Rohkamm, Peter Birtel, F. Scholze +1 more

   2023Journal of Vacuum Science & Technology A13 citations Open access

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2. Characterization of an RF excited broad beam ion source operating with inert gases

   E. Rohkamm, D. Spemann, F. Scholze, F. Frost

   2021Journal of Applied Physics13 citations Open access

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3. Influence of the RF-power on the etching yields and surface morphology in reactive ion beam etching of Si and photoresist

   E. Rohkamm, Daniel Spemann, F. Scholze, Frank Frost

   2024Journal of Applied Physics9 citations Open access

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4. Characterization of an RF-excited broad beam ion source operated with a mixture of CHF3 and O2

   E. Rohkamm, Daniel Spemann, F. Scholze, Frank Frost

   2024Journal of Applied Physics7 citations Open access

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5. Properties of secondary particles for the reactive ion beam sputtering of Ti and TiO2 using oxygen ions

   Thomas Amelal, Lukas Pietzonka, E. Rohkamm, C. Bundesmann

   2020Journal of Vacuum Science and Technology4 citations Open access

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6. Influence of water background pressure on removal rates of SiO<mml:math xmlns:mml="http://www.w3.org/1998/Math/MathML" altimg="si5.svg" display="inline" id="d1e651"><mml:msub><mml:mrow/><mml:mrow><mml:mn>2</mml:mn></mml:mrow></mml:msub></mml:math>, Si and photo resist in reactive ion beam etching

   Peter Birtel, E. Rohkamm, J. Bauer, Frank Frost

   2025Surfaces and Interfaces1 citations Open access

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7. Erratum: “Characterization of an RF excited broad beam ion source operating with inert gases” [J. Appl. Phys. 129, 223305 (2021)]

   E. Rohkamm, D. Spemann, F. Scholze, F. Frost

   2022Journal of Applied Physics0 citations

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8. ARE ARMOURED FRIGATES FEASIBLE

   E. Rohkamm

   19850 citations

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9. DYNAMIC BEHAVIOR OF MARINE GAS TURBINES FOR ICE-BREAKING SHIPS

   E. Rohkamm

   19790 citations

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10. TRANSIENT BEHAVIOUR OF GASTURBO-ELECTRIC PROPULSION PLANT WITH SINGLE SHAFT GAS TURBINE AND FIXED PITCH PROPELLER

    E. Rohkamm

    19780 citations

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