M. Hornung

Most-cited papers

Ultrasound barrier microsystem for object detection based on micromachined transducer elements
O. Brand, M. Hornung, H. Baltes, C. Hafner
199727 citations
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IC MEMS microtransducers
H. Baltes, O. Paul, J. Korvink, M. Schneider +8 more
1996International Electron Devices Meeting. Technical Digest25 citations
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Sacrificial aluminum etching for CMOS microstructures
Oliver Paul, D. Westberg, M. Hornung, V. Ziebart +1 more
1997Proceedings IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots20 citations
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Micromachined Ultrasound-Based Proximity Sensors
M. Hornung, O. Brand
199915 citations
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Ultrasound transducer for distance measurements
M. Hornung, O. Brand, Oliver Paul, H. Baltes
1997International Conference on Solid-State Sensors, Actuators and Microsystems12 citations
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Integrated micromachined decoupled CMOS chip on chip
M. Schneider, T. Muller, A. Haberli, M. Hornung +1 more
1997Proceedings IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots11 citations
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Ultrasound barrier based on packaged micromachined membrane resonators
M. Hornung, R. Frey, O. Brand, H. Baltes +1 more
1995Proceedings IEEE Micro Electro Mechanical Systems. 199510 citations
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Micromachined acoustic Fabry-Perot system for distance measurement
M. Hornung, O. Brand, O. Paul, H. Baltes +2 more
1998Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.98CH361768 citations
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Optimization Of Micromachined Ultrasound Transducer By Finite Element Simulation
M. Hornung, O. Brand, H. Baltes
1995International Conference on Solid-State Sensors, Actuators and Microsystems6 citations
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CMOS resonant sensors
O. Brand, M. Hornung, D. Lange, H. Baltes
1998Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components2 citations
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Long-term stability of membrane transducers for proximity sensing
M. Hornung, O. Brand, O. Paul, H. Baltes
1998Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components2 citations
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Packaging of Transducers
M. Hornung, O. Brand
19991 citations
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CMOS resonant microsensors
O. Brand, M. Hornung, D. Lange, H. Baltes
19981 citations
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Thermal gas measuring device
M. Hornung
20180 citations
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Novel Highly Biocompatible Hollow Fiber Membrane for Plasma Filtration
A. Boschetti-de-Fierro, M. Hornung, H. Lebsanft, R. Dietrich +1 more
20120 citations Open access
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Method for calibrating a flow sensor, and a flow sensor arrangement
F. Mayer, M. Hornung, S. Wehrli, D. Graf
20100 citations
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Hollow fiber membrane and process for production thereof
B. Krause, H. Goehl, M. Hornung, C. Kraft
20070 citations
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Hollow fiber membrane and process for their manufacture
B. Krause, H. Goehl, M. Hornung, C. Kraft
20070 citations
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Hydrophilic membrane with non-ionic surfactant
B. Krause, M. Hornung, S. Hagg, R. Deppisch
20070 citations
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Flow sensor with durchflussanpassbarem analog to digital converter
F. Mayer, M. Lechner, M. Hornung, Waldkirch Marc Von
20060 citations
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Membrane for plasma separation
B. Krause, M. Hornung, H. Goehl
20060 citations
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Design Considerations For Silicon Resonators
M. Hornung, O. Brand
19990 citations
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