K. Suzuki

Evaluation Of Lithographic Performance Of X-Ray Stepper XS-1

T. Taguchi, S. Mitsui, Y. Tanaka, K. Fujii +16 more

1998Digest of Papers. Microprocesses and Nanotechnology'98. 198 International Microprocesses and Nanotechnology Conference (Cat. No.98EX135)0 citations

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K. Suzuki

Most-cited papers

A 1024-element high-performance silicon tactile imager

CMOS integrated silicon pressure sensor

Measurement of fracture stress, young's modulus, and intrinsic stress of heavily boron-doped silicon microstructures

High aspect ratio electrostatic micro actuators using LIGA process

Single crystal silicon rotational micromotors

Temperature‐frequency characteristics simulation of piezoelectric resonators and their equivalent circuits based on three‐dimensional finite element modelling

Ultrasonic Phased Array Transducer for Acoustic Imaging in Air

A silicon pressure sensor with stainless diaphragm for high temperature and chemical application

High flatness mask for step and repeat x‐ray lithography

SiN membrane masks for x‐ray lithography

FREQUENCY-TEMPERATURE CHARACTERISTIC ANALYSIS OF PIEZOELECTRIC RESONATORS USING FINITE ELEMENT MODELING

Low-dose exposure technique for 100-nm-diam hole replication in x-ray lithography

Submicrometer CMOS device fabrication using an X-ray stepper

MOS Device Fabrication Using X‐Ray Lithography

Silicon IC compatible LIGA mask-fabrication process

X‐ray mask fabrication using advanced optical lithography

X-ray mask technology: Low-stress tungsten deposition and sub-half-micron absorber fabrication by single-layer resist

Effects of Exposure Atmosphere and Ejected Electrons on PGMA Negative Resist Cross‐Linking in X‐Ray Lithography

Influence of packaging on frequency drift in MEMS resonators-Dynamic effect of packaging on MEMS device performance

Approach to full-chip simulation and correction of stencil mask distortion for proximity electron lithography

Airborne ultrasonic array transducer utilizing silicon micromachining

Highly reliable oscillating mirror system for synchrotron radiation lithography

X-ray lithography for submicron device fabrication

Fabrication of NIST-format x-ray masks with 4-Gbit DRAM test patterns

Evaluation Of Lithographic Performance Of X-Ray Stepper XS-1

An Implementation of Transient Enhanced Diffusion Model into the FEM-based 2-D Process Simulator FFEAST

Development of an electrostatic linear actuator by micromachining processes

Development of quarter-micron SAW devices using X-ray lithography and ECR-RIBE processes

Half Micron Cmos Device Fabrication Using Hybrid Lithography With X-Ray And Optical Steppers

HIGH PRECISION HALF-MICRON X-RAY MASK GENERATION BY E-BEAM LITHOGRAPHY

BEHAVIORS OF GRAPHITE IN CAST IRON IN THE PROCESS OF RAPID MELTING USING A SPOT WELDER