W. Noell

Most-cited papers

A dual-axis pointing mirror with moving-magnet actuation
Ç. Ataman, S. Lani, W. Noell, N. D. de Rooij
201368 citations Open access
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Arrays of High Tilt-Angle Micromirrors for Multiobject Spectroscopy
Severin Waldis, F. Zamkotsian, P. Clerc, W. Noell +2 more
2007IEEE Journal of Selected Topics in Quantum Electronics55 citations Open access
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The two-dimensional array of 2048 tilting micromirrors for astronomical spectroscopy
M. Canonica, F. Zamkotsian, P. Lanzoni, W. Noell +1 more
201344 citations Open access
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Fabrication and characterization of linear diffusers based on concave micro lens arrays.
R. Bitterli, T. Scharf, H. Herzig, W. Noell +7 more
2010Optics Express42 citations Open access
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Refraction limit of miniaturized optical systems: a ball-lens example.
Myun-Sik Kim, T. Scharf, S. Mühlig, M. Fruhnert +5 more
2016Optics Express31 citations Open access
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Solid on liquid deposition
J. Charmet, O. Banakh, E. Laux, B. Graf +13 more
201026 citations Open access
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Multifunctional micro-optical elements for laser beam homogenizing and beam shaping
A. Bich, J. Rieck, C. Dumouchel, S. Roth +13 more
2008SPIE LASE25 citations Open access
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Micromirrors for multiobject spectroscopy: optical and cryogenic characterization
S. Waldis, F. Zamkotsian, P. Lanzoni, W. Noell +1 more
2008SPIE MOEMS-MEMS25 citations Open access
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Spectral phase, amplitude, and spatial modulation from ultraviolet to infrared with a reflective MEMS pulse shaper.
J. Extermann, S. Weber, D. Kiselev, L. Bonacina +5 more
2011Optics Express22 citations Open access
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Ultraviolet and near-infrared femtosecond temporal pulse shaping with a new high-aspect-ratio one-dimensional micromirror array.
S. Weber, J. Extermann, L. Bonacina, W. Noell +4 more
2010Optics Letters19 citations Open access
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Interferometric characterization of MOEMS devices in cryogenic environment for astronomical instrumentation
F. Zamkotsian, E. Grassi, S. Waldis, R. Barette +4 more
2008SPIE MOEMS-MEMS19 citations
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Design, simulation, fabrication, packaging, and characterization of a MEMS-based mirror array for femtosecond pulse-shaping in phase and amplitude.
S. Weber, L. Bonacina, W. Noell, D. Kiselev +6 more
2011Review of Scientific Instruments17 citations Open access
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Printing sub-micron structures using Talbot mask-aligner lithography with a 193 nm CW laser light source.
A. Vetter, R. Kirner, Dmitrijs Opalevs, M. Scholz +5 more
2018Optics Express14 citations Open access
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Development of MEMS-based programmable slit mask for multi-object spectroscopy
M. Canonica, S. Waldis, F. Zamkotsian, P. Lanzoni +2 more
2010Astronomical Telescopes + Instrumentation14 citations Open access
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Correction of spherical surface measurements by confocal microscopy
J. Béguelin, T. Scharf, W. Noell, R. Voelkel
2020Measurement science and technology13 citations Open access
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Mask-aligner lithography using a continuous-wave diode laser frequency-quadrupled to 193 nm.
R. Kirner, A. Vetter, Dmitrijs Opalevs, C. Gilfert +6 more
2018Optics Express13 citations Open access
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Improvements on the uniformity of large-area microlens arrays in Fused Silica.
R. Kirner, J. Béguelin, M. Eisner, W. Noell +2 more
2019Optics Express11 citations Open access
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Optical characterization of fully programmable MEMS diffraction gratings.
F. Zamkotsian, B. Timotijevic, R. Lockhart, R. Stanley +5 more
2012Optics Express8 citations Open access
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Semiconductor-based narrow-line and high-brilliance 193-nm laser system for industrial applications
Dmitrijs Opalevs, M. Scholz, C. Gilfert, A. Vetter +11 more
2018LASE7 citations Open access
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Large MEMS-based programmable reflective slit mask for multi-object spectroscopy fabricated using multiple wafer-level bonding
M. Canonica, F. Zamkotsian, P. Lanzoni, W. Noell +1 more
2012Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components7 citations Open access
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Large micromirror array for multi-object spectroscopy in a cryogenic environment
M. Canonica, S. Waldis, F. Zamkotsian, P. Lanzoni +3 more
2009MOEMS-MEMS7 citations Open access
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Mask-aligner Talbot lithography using a 193nm CW light source
A. Vetter, R. Kirner, Dmitrijs Opalevs, M. Scholz +5 more
2018Advanced Lithography6 citations Open access
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High aspect ratio micromirror array with two degrees of freedom for femtosecond pulse shaping
S. Weber, W. Noell, S. Lani, F. Jutzi +6 more
2010MOEMS-MEMS6 citations Open access
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Realization and characterization of a MEMS-based programmable slit mask for multi-object spectroscopy
M. Canonica, S. Waldis, F. Zamkotsian, P. Lanzoni +2 more
2010MOEMS-MEMS6 citations Open access
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Linear micromirror array for broadband femtosecond pulse shaping in phase and amplitude
S. Weber, S. Waldis, W. Noell, D. Kiselev +4 more
2009MOEMS-MEMS6 citations Open access
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Optical beam steering using a 2D MEMS scanner
Y. Petremand, P. Clerc, M. Epitaux, R. Hauffe +2 more
2007International Symposium on Optomechatronic Technologies6 citations Open access
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Computational rule-based approach for corner correction of non-Manhattan geometries in mask aligner photolithography.
A. Vetter, Chen Yan, R. Kirner, T. Scharf +3 more
2019Optics Express5 citations Open access
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Enabling proximity mask-aligner lithography with a 193nm CW light source
R. Kirner, A. Vetter, Dmitrijs Opalevs, M. Scholz +5 more
2018Advanced Lithography5 citations Open access
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Large linear micromirror array for UV femtosecond laser pulse shaping
S. Waldis, S. Weber, W. Noell, J. Extermann +4 more
20082008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics5 citations Open access
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Uniform tilt-angle micromirror array for multiobject spectroscopy
S. Waldis, F. Zamkotsian, P. Clerc, W. Noell +3 more
20085 citations
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Micromirrors for Multiobject Spectroscopy: Large Array Actuation and Cryogenic Compatibility
S. Waldis, P. Ayyalasomayajula, W. Noell, N. D. de Rooij +1 more
20072007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics5 citations Open access
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Uniform tilt-angle micromirror array for multi-object spectroscopy
S. Waldis, P. Clerc, F. Zamkotsian, M. Zickar +2 more
2007SPIE MOEMS-MEMS5 citations Open access
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Optical characterization of two-dimensional array of 2,048 tilting micromirrors for astronomical spectroscopy.
M. Canonica, F. Zamkotsian, P. Lanzoni, W. Noell +1 more
2013Optics Express4 citations Open access
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Optical MEMS for space spectro-imagers
A. Liotard, F. Zamkotsian, W. Noell, T. Viard +3 more
2012Other Conferences4 citations
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Fabrication and characterization of 3D integrated 2 DOF Micromirror Arrays for excessive thermal loads
Ç. Ataman, S. Lani, W. Noell, F. Jutzi +2 more
20112011 IEEE 24th International Conference on Micro Electro Mechanical Systems4 citations Open access
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Development of on-CMOS chip micro-photonic and MOEMS systems
L. Snyman, T. Okhai, T. Bourouina, W. Noell
2011MOEMS-MEMS4 citations Open access
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MEMS-based programmable reflective slit mask for multi-object spectroscopy
M. Canonica, F. Zamkotsian, P. Lanzoni, W. Noell +1 more
2011MOEMS-MEMS4 citations Open access
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Vertical electrostatically 90° turning flaps for reflective MEMS display
F. Jutzi, W. Noell, N. D. de Rooij
2011MOEMS-MEMS4 citations Open access
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Low voltage electrostatic 90° turning flap for reflective MEMS display
F. Jutzi, F. Gueissaz, W. Noell, N. D. de Rooij
2010International Conference on Optical MEMS and Nanophotonics4 citations Open access
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Micromirror arrays designed and tested for space instrumentation
F. Zamkotsian, M. Canonica, Kyrre Tangen, P. Lanzoni +8 more
2010International Conference on Optical MEMS and Nanophotonics4 citations
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Thermal Characterization of Polycrystalline CVD Diamond Thin Films
S. Lani, Ç. Ataman, W. Noell, D. Briand +1 more
20094 citations Open access
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Leveraging wafer-level manufacturing process limitations to increase large-scale fused silica microlens array uniformity
R. Kirner, J. Béguelin, W. Noell, M. Eisner +2 more
2019Optical Engineering + Applications3 citations Open access
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High power modular LED-based illumination system for lithography applications
J. Bernasconi, T. Scharf, M. Groccia, R. Kirner +2 more
2018Optical Engineering + Applications3 citations Open access
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Shaping light with MOEMS
W. Noell, S. Weber, J. Masson, J. Extermann +10 more
2011MOEMS-MEMS3 citations Open access
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Beam steering system using a 2D MEMS scanner
Y. Petremand, M. Epitaux, R. Hauffe, W. Noell +1 more
2007Lasers and Electro-Optics Society Meeting3 citations Open access
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Compact large-stroke piston tip-tilt actuator and mirror
W. Noell, A. Hugi, T. Overstolz, R. Stanley +2 more
2007SPIE MOEMS-MEMS3 citations
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Tolerancing the surface form of aspheric microlenses manufactured by wafer-level optics techniques.
J. Béguelin, W. Noell, T. Scharf, R. Voelkel
2020Applied Optics2 citations Open access
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Spatial coherence properties of an LED-based illumination system for mask-aligner lithography
J. Bernasconi, T. Scharf, R. Kirner, W. Noell +2 more
2019Advanced Lithography2 citations Open access
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MOEMs devices for future astronomical instrumentation in space
F. Zamkotsian, A. Liotard, P. Lanzoni, K. el Hadi +7 more
2017International Conference on Space Optics2 citations Open access
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Array imaging system for lithography
R. Kirner, K. Mueller, Pauline Malaurie, U. Vogler +3 more
2016Optical Engineering + Applications2 citations Open access
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