Secondary Electrons in EUV Lithography
Justin Torok, Ryan Del Re, Henry C. Herbol, Sanjana Das +7 more
Researcher profile · Semantic Scholar
Justin Torok, Ryan Del Re, Henry C. Herbol, Sanjana Das +7 more
Justin Torok, P. Maia, Fon Powell, S. Pandya +1 more
Chaitali Anand, P. Maia, Justin Torok, Chris Mezias +1 more
Justin Torok, Bharath G. Srivats, S. Memon, Henry C. Herbol +5 more
Justin Torok, P. Maia, Parul Verma, Chris Mezias +1 more
Chaitali Anand, F. Abdelnour, Benjamin S. Sipes, Daren Ma +3 more
Ashish Raj, Justin Torok, K. Ranasinghe
Veronica Tora, Justin Torok, Michiel Bertsch, Ashish Raj
Chaitali Anand, Justin Torok, F. Abdelnour, P. Maia +1 more
Justin Torok, Chaitali Anand, Parul Verma, A. Raj
Justin Torok, P. Maia, Chaitali Anand, Ashish Raj
P. Maia, S. Pandya, Benjamin Freeze, Justin Torok +3 more
Sheng-Huan Sun, Justin Torok, Chris Mezias, Daren Ma +1 more
Chris Mezias, Justin Torok, P. Maia, E. Markley +1 more
Yuanxi Li, Justin Torok, Shujing Zhang, Jessica Ding +13 more
Justin Torok, Chris Mezias, Ashish Raj
Justin Torok, P. Maia, Chaitali Anand, A. Raj
Chris Mezias, Justin Torok, P. Maia, A. Raj
S. Teshome, Justin Torok, Chris Mezias, Ajay Gupta +1 more
Justin Torok, Chris Mezias, Ashish Raj
Robin Sandell, Justin Torok, Srikantan Nagaragan, K. Ranasinghe +2 more
P. Maia, S. Pandya, Justin Torok, Ajay Gupta +2 more
Robin Sandell, Justin Torok, Srikantan Nagaragan, K. Ranasinghe +2 more
Robin Sandell, Justin Torok, S. Nagarajan, K. Ranasinghe +2 more
Yuanxi Li, Justin Torok, Jessica Ding, Ning Wang +11 more
Xi-Zheng Yu, Justin Torok, S. Pandya, Sourav Pal +2 more
Chaitali Anand, P. Maia, Justin Torok, Chris Mezias +1 more
C. Brisbois, Austyn Brisbois, R. Brainard, Justin Torok +7 more
Justin Torok, P. Maia, Parul Verma, Chris Mezias +1 more
Chris Mezias, Justin Torok, P. Maia, E. Markley +1 more
Robin Sandell, Justin Torok, Daren Ma, Ashish Raj
P. Maia, S. Pandya, Benjamin Freeze, Justin Torok +3 more