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Chi-Chun Liu · SciRah

Researcher profile · Semantic Scholar

Chi-Chun Liu

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Chi-Chun Liu — researcher profile on SciRah

h-index: 28
Works: 86
Citations: 3,412

Most-cited papers

Directed self-assembly of block copolymers for nanolithography: fabrication of isolated features and essential integrated circuit geometries.
M. P. Stoykovich, Hui-Man Kang, K. Daoulas, Guoliang Liu +4 more
2007ACS Nano423 citations
Semantic Scholar
Chemical Patterns for Directed Self-Assembly of Lamellae-Forming Block Copolymers with Density Multiplication of Features
Chi-Chun Liu, A. Ramírez-Hernández, E. Han, G. S. W. Craig +7 more
2013231 citations
Semantic Scholar
Fabrication of Lithographically Defined Chemically Patterned Polymer Brushes and Mats
Chi-Chun Liu, E. Han, M. S. Onses, C. Thode +3 more
2011205 citations
Semantic Scholar
Directed self-assembly of block copolymers on chemical patterns: A platform for nanofabrication
Sheng-Xiang Ji, L. Wan, Chi-Chun Liu, P. Nealey
2016204 citations
Semantic Scholar
Perpendicular Orientation of Domains in Cylinder-Forming Block Copolymer Thick Films by Controlled Interfacial Interactions
E. Han, Karl O. Stuen, Melvina Leolukman, Chi-Chun Liu +2 more
2009185 citations
Semantic Scholar
One‐Step Direct‐Patterning Template Utilizing Self‐Assembly of POSS‐Containing Block Copolymers
Tomoyasu Hirai, Melvina Leolukman, Chi-Chun Liu, E. Han +6 more
2009Advances in Materials170 citations
Semantic Scholar
Two-dimensional pattern formation using graphoepitaxy of PS-b-PMMA block copolymers for advanced FinFET device and circuit fabrication.
Hsinyu Tsai, J. Pitera, H. Miyazoe, S. Bangsaruntip +9 more
2014ACS Nano156 citations
Semantic Scholar
Directed self-assembly of block copolymers for 7 nanometre FinFET technology and beyond
Chi-Chun Liu, Elliott Franke, Y. Mignot, R. Xie +9 more
2018Nature Electronics128 citations
Semantic Scholar
Generalization of the Use of Random Copolymers To Control the Wetting Behavior of Block Copolymer Films
Shengxiang Ji, Chi-Chun Liu, Jeong Gon Son, K. W. Gotrik +5 more
2008Figshare113 citations Open access
Semantic Scholar
Metal nanodot memory by self-assembled block copolymer lift-off.
A. Hong, Chi-Chun Liu, Yong Wang, Jiyoung Kim +5 more
2010Nano letters (Print)112 citations Open access
Semantic Scholar
Graphoepitaxial Assembly of Symmetric Block Copolymers on Weakly Preferential Substrates
E. Han, Hui-Man Kang, Chi-Chun Liu, P. Nealey +1 more
2010Advances in Materials92 citations
Semantic Scholar
Domain Orientation and Grain Coarsening in Cylinder-Forming Poly(styrene-b-methyl methacrylate) Films
Shengxiang Ji, Chi-Chun Liu, Wen‐Shiang Liao, Alyssa L. Fenske +2 more
201190 citations
Semantic Scholar
Plasma etch removal of poly(methyl methacrylate) in block copolymer lithography
Yuk-Hong Ting, Sang-min Park, Chi-Chun Liu, Xiao-Song Liu +3 more
200889 citations
Semantic Scholar
Surface Roughening of Polystyrene and Poly(methyl methacrylate) in Ar/O2 Plasma Etching
Yuk-Hong Ting, Chi-Chun Liu, Sang-min Park, Hongquan Jiang +2 more
201088 citations Open access
Semantic Scholar
Integration of block copolymer directed assembly with 193 immersion lithography
Chi-Chun Liu, P. Nealey, Alex K. Raub, Philip J. Hakeem +3 more
201074 citations
Semantic Scholar
Three‐dimensional Directed Assembly of Block Copolymers together with Two‐dimensional Square and Rectangular Nanolithography
Shengxiang Ji, Umang Nagpal, Wen‐Shiang Liao, Chi-Chun Liu +2 more
2011Advances in Materials71 citations
Semantic Scholar
Towards an all-track 300 mm process for directed self-assembly
Chi-Chun Liu, C. Thode, P. R. Delgadillo, G. S. W. Craig +2 more
201165 citations
Semantic Scholar
An Adaptive Finite Volume Method for Incompressible Heat Flow Problems in Solidification
Chung-Wen Lan, Chi-Chun Liu, C.-M. Hsu
200259 citations Open access
Semantic Scholar
Pattern transfer using poly(styrene-block-methyl methacrylate) copolymer films and reactive ion etching
Chi-Chun Liu, P. Nealey, Yuk-Hong Ting, A. Wendt
200755 citations
Semantic Scholar
Nanofabrication of broad-band antireflective surfaces using self-assembly of block copolymers.
B. Päivänranta, P. Sahoo, E. Tocce, V. Auzelyte +6 more
2011ACS Nano47 citations
Semantic Scholar
Orientation of Block Copolymer Resists on Interlayer Dielectrics with Tunable Surface Energy
H. Suh, Hui-Man Kang, Chi-Chun Liu, P. Nealey +1 more
2010Figshare47 citations Open access
Semantic Scholar
Pattern placement accuracy in block copolymer directed self-assembly based on chemical epitaxy.
G. Doerk, Chi-Chun Liu, Joy Y. Cheng, C. Rettner +5 more
2013ACS Nano34 citations
Semantic Scholar
Sub-30 nm pitch line-space patterning of semiconductor and dielectric materials using directed self-assembly
Hsinyu Tsai, H. Miyazoe, S. Engelmann, Bang To +8 more
201234 citations
Semantic Scholar
Characterization of Cylinder-Forming Block Copolymers Directed to Assemble on Spotted Chemical Patterns
Sang-min Park, G. S. W. Craig, Chi-Chun Liu, Young-Hye La +2 more
200834 citations
Semantic Scholar
Highly selective immobilization of Au nanoparticles onto isolated and dense nanopatterns of poly(2-vinyl pyridine) brushes down to single-particle resolution.
M. S. Onses, Chi-Chun Liu, C. Thode, P. Nealey
2012Langmuir31 citations
Semantic Scholar
Site‐Specific Placement of Au Nanoparticles on Chemical Nanopatterns Prepared by Molecular Transfer Printing Using Block‐Copolymer Films
M. S. Onses, Christopher J. Thode, Chi-Chun Liu, Shengxiang Ji +3 more
201131 citations
Semantic Scholar
Progress towards the integration of optical proximity correction and directed self-assembly of block copolymers with graphoepitaxy
Chi-Chun Liu, J. Pitera, N. Lafferty, K. Lai +4 more
2012Advanced Lithography30 citations
Semantic Scholar
Efficient adaptive phase field simulation of dendritic growth in a forced flow at low supercooling
Chung-Wen Lan, C.-M. Hsu, Chi-Chun Liu
200229 citations Open access
Semantic Scholar
Molecular transfer printing using block copolymers.
Shengxiang Ji, Chi-Chun Liu, Guoliang Liu, P. Nealey
2009ACS Nano27 citations
Semantic Scholar
Directed self-assembly of block copolymer films on atomically-thin graphene chemical patterns
Tzu-Hsuan Chang, S. Xiong, R. Jacobberger, S. Mikael +7 more
2016Scientific Reports26 citations Open access
Semantic Scholar
Computational aspects of optical lithography extension by directed self-assembly
K. Lai, Chi-Chun Liu, J. Pitera, D. Dechene +11 more
2013Advanced Lithography24 citations
Semantic Scholar
Localization of multiple DNA sequences on nanopatterns.
M. S. Onses, P. Pathak, Chi-Chun Liu, F. Cerrina +1 more
2011ACS Nano22 citations Open access
Semantic Scholar
Creating periodic local strain in monolayer graphene with nanopillars patterned by self-assembled block copolymer
Hongyi Mi, S. Mikael, Chi-Chun Liu, Jung-Hun Seo +4 more
201520 citations
Semantic Scholar
Directed self-assembly of solvent-vapor-induced non-bulk block copolymer morphologies on nanopatterned substrates.
L. Wan, Shengxiang Ji, Chi-Chun Liu, G. S. W. Craig +1 more
2016Soft Matter19 citations
Semantic Scholar
Towards electrical testable SOI devices using Directed Self-Assembly for fin formation
Chi-Chun Liu, Cristina Estrada-Raygoza, Hong He, Michael Cicoria +17 more
2014Advanced Lithography18 citations
Semantic Scholar
Surface Assembly Configurations and Packing Preferences of Fibrinogen Mediated by the Periodicity and Alignment Control of Block Copolymer Nanodomains.
T. Xie, Ankit Vora, Patrick J. Mulcahey, Sonia E. Nanescu +6 more
2016ACS Nano17 citations Open access
Semantic Scholar
High chi block copolymer DSA to improve pattern quality for FinFET device fabrication
Hsinyu Tsai, H. Miyazoe, Ankit Vora, T. Magbitang +13 more
2016SPIE Advanced Lithography16 citations
Semantic Scholar
Assembly of nanocrystal arrays by block-copolymer-directed nucleation.
Stephen A. Morin, Young-Hye La, Chi-Chun Liu, Jeremy A. Streifer +3 more
2009Angewandte Chemie16 citations
Semantic Scholar
Practical implementation of order parameter calculation for directed assembly of block copolymer thin films
Chi-Chun Liu, G. S. W. Craig, Hui-Man Kang, R. Ruiz +2 more
200915 citations
Semantic Scholar
Controlled growth of InGaAs/InGaAsP quantum dots on InP substrates employing diblock copolymer lithography
J. Park, J. Kirch, L. Mawst, Chi-Chun Liu +2 more
200915 citations
Semantic Scholar
Measuring local CD uniformity in EUV vias with scatterometry and machine learning
D. Kong, D. Schmidt, J. Church, Chi-Chun Liu +11 more
202014 citations
Semantic Scholar
Design technology co-optimization assessment for directed self-assembly-based lithography: design for directed self-assembly or directed self-assembly for design?
K. Lai, Chi-Chun Liu, Hsinyu Tsai, Yong-An Xu +16 more
201713 citations
Semantic Scholar
Computational lithography platform for 193i-guided directed self-assembly
K. Lai, Melih Ozlem, J. Pitera, Chi-Chun Liu +13 more
2014Advanced Lithography13 citations
Semantic Scholar
Directed self-assembly process implementation in a 300mm pilot line environment
Chi-Chun Liu, I. Estrada-Raygoza, Jassem Abdallah, S. Holmes +10 more
2013Advanced Lithography13 citations
Semantic Scholar
Defect reduction in epitaxial GaSb grown on nanopatterned GaAs substrates using full wafer block copolymer lithography
S. Jha, Chi-Chun Liu, Tung-Sheng Kuan, S. Babcock +4 more
200913 citations
Semantic Scholar
DSA patterning options for FinFET formation at 7nm node
Chi-Chun Liu, Elliott Franke, F. Lie, S. Sieg +13 more
2016SPIE Advanced Lithography12 citations
Semantic Scholar
Strategies for aggressive scaling of EUV multi-patterning to sub-20 nm features
A. Dutta, J. Church, Joe Lee, Brendan O'Brien +20 more
2020Advanced Lithography11 citations
Semantic Scholar
The One-Pot Directed Assembly of Cylinder-Forming Block Copolymer on Adjacent Chemical Patterns for Bimodal Patterning.
Tzu-Hsuan Chang, S. Xiong, Chi-Chun Liu, Dong Liu +2 more
2017Macromolecular rapid communications11 citations Open access
Semantic Scholar
Pattern transfer of directed self-assembly patterns for CMOS device applications
Hsinyu Tsai, H. Miyazoe, S. Engelmann, Chi-Chun Liu +8 more
201311 citations
Semantic Scholar
Nanoscale selective growth and optical characteristics of quantum dots on III-V substrates prepared by diblock copolymer nanopatterning
J. H. Park, Chi-Chun Liu, M. Rathi, L. Mawst +2 more
200911 citations
Semantic Scholar

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