P. Muralt

Most-cited papers

1. Piezoelectric aluminum nitride thin films for microelectromechanical systems

   G. Piazza, V. Felmetsger, P. Muralt, Roy H. Iii Olsson +1 more

   2012MRS bulletin224 citations Open access

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2. Induced giant piezoelectricity in centrosymmetric oxides

   D. Park, M. Hadad, L. M. Riemer, R. Ignatans +11 more

   2021Science159 citations Open access

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3. Piezoelectric Al1−xScxN thin films: A semiconductor compatible solution for mechanical energy harvesting and sensors

   R. Matloub, M. Hadad, A. Mazzalai, N. Chidambaram +4 more

   2013150 citations Open access

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4. Domain Pinning: Comparison of Hafnia and PZT Based Ferroelectrics

   F. Fengler, M. Pešić, S. Starschich, T. Schneller +9 more

   2017130 citations Open access

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5. Microstructure and dielectric properties of piezoelectric magnetron sputtered w-ScxAl1-xN thin films

   A. Žukauskaitė, G. Wingqvist, J. Palisaitis, J. Jensen +6 more

   2012124 citations Open access

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6. Resonant PZT MEMS Scanner for High-Resolution Displays

   U. Baran, Dean R. Brown, S. Holmstrom, D. Balma +3 more

   2012Journal of microelectromechanical systems115 citations Open access

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7. Abnormal Grain Growth in AlScN Thin Films Induced by Complexion Formation at Crystallite Interfaces

   C. Sandu, F. Parsapour, S. Mertin, V. Pashchenko +4 more

   2018Physica Status Solidi (a)100 citations Open access

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8. Piezoelectric and structural properties of c-axis textured aluminium scandium nitride thin films up to high scandium content

   S. Mertin, B. Heinz, O. Rattunde, G. Christmann +3 more

   2018Surface & Coatings Technology85 citations Open access

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9. Analysis of Performance Instabilities of Hafnia‐Based Ferroelectrics Using Modulus Spectroscopy and Thermally Stimulated Depolarization Currents

   F. Fengler, R. Nigon, P. Muralt, E. Grimley +6 more

   201868 citations Open access

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10. Atomically engineered interfaces yield extraordinary electrostriction

    Haiwu Zhang, N. Pryds, Dae-Sung Park, N. Gauquelin +12 more

    2021Nature57 citations Open access

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11. Effect of oxygen defects blocking barriers on gadolinium doped ceria (GDC) electro-chemo-mechanical properties

    A. Kabir, Simone Santucci, N. Ngo, Maxim Varenik +4 more

    2019Acta Materialia55 citations Open access

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12. Characterization and Fatigue of the Converse Piezoelectric Effect in PZT Films for MEMS Applications

    A. Mazzalai, D. Balma, N. Chidambaram, R. Matloub +1 more

    2015Journal of microelectromechanical systems53 citations Open access

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13. Al0.83Sc0.17N Contour-Mode Resonators With Electromechanical Coupling in Excess of 4.5%

    A. Lozzi, Ernest Ting-Ta Yen, P. Muralt, L. G. Villanueva

    2019IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control48 citations Open access

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14. Key-features in processing and microstructure for achieving giant electrostriction in gadolinium doped ceria thin films

    M. Hadad, Husnain Ashraf, G. Mohanty, C. Sandu +1 more

    201641 citations Open access

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15. Measurement of effective piezoelectric coefficients of PZT thin films for energy harvesting application with interdigitated electrodes

    N. Chidambaram, A. Mazzalai, P. Muralt

    2012IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control38 citations Open access

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16. Nanocrystalline Low‐Refractive Magnesium Fluoride Films Deposited by Reactive Magnetron Sputtering: Optical and Structural Properties

    S. Mertin, L. Marot, C. Sandu, R. Steiner +2 more

    201531 citations Open access

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17. Hybrid BAW/SAW AlN and AlScN thin film resonator

    V. Pashchenko, R. Matloub, Fazel Parsapourkolour, P. Muralt +2 more

    2016IUS30 citations Open access

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18. Biaxial texture development in aluminum nitride layers during off-axis sputter deposition

    R. Deng, P. Muralt, D. Gall

    201230 citations Open access

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19. Dimensional and Structural Control of Silica Aerogel Membranes for Miniaturized Motionless Gas Pumps.

    Shan-Yu Zhao, B. Jiang, T. Maeder, P. Muralt +5 more

    2015ACS Applied Materials and Interfaces27 citations Open access

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20. Enhanced piezoelectric properties of c-axis textured aluminium scandium nitride thin films with high scandium content: Influence of intrinsic stress and sputtering parameters

    S. Mertin, V. Pashchenko, F. Parsapour, C. Sandu +5 more

    2017IUS23 citations Open access

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21. A thermally self-sustained micro-power plant with integrated micro-solid oxide fuel cells, micro-reformer and functional micro- fluidic carrier

    Barbara Scherrer, A. Evans, A. Santis-Alvarez, B. Jiang +15 more

    201423 citations Open access

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22. Design and packaging of a highly integrated microreactor system for high-temperature on-board hydrogen production

    B. Jiang, A. Santis-Alvarez, P. Muralt, D. Poulikakos +3 more

    201522 citations Open access

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23. Impact of negative bias on the piezoelectric properties through the incidence of abnormal oriented grains in Al0.62Sc0.38N thin films

    C. Sandu, F. Parsapour, D. Xiao, Robin Nigon +3 more

    202021 citations Open access

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24. AlN Thin Film Processing and Basic Properties

    P. Muralt

    201721 citations

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25. Geometry of Chemical Beam Vapor Deposition System for Efficient Combinatorial Investigations of Thin Oxide Films: Deposited Film Properties versus Precursor Flow Simulations.

    E. Wagner, C. Sandu, S. Harada, Cédric Pellodi +3 more

    2016ACS Combinatorial Science21 citations Open access

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26. Experimental study of single triple-phase-boundary and platinum-yttria stabilized zirconia composite as cathodes for micro-solid oxide fuel cells

    Yan Yan, S. C. Sandu, J. Conde, P. Muralt

    201221 citations Open access

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27. Characterization methodology for lead zirconate titanate thin films with interdigitated electrode structures

    R. Nigon, T. M. Raeder, P. Muralt

    201719 citations Open access

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28. Fine structuration of low-temperature co-fired ceramic (LTCC) microreactors.

    B. Jiang, Julien Haber, A. Renken, P. Muralt +2 more

    2015Lab on a Chip19 citations Open access

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29. High Piezoelectric Longitudinal Coefficients in Sol–gel PZT Thin Film Multilayers

    Davide Balma, A. Mazzalai, N. Chidambaram, C. Sandu +5 more

    201419 citations Open access

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30. A micro heater platform with fluid channels for testing micro-solid oxide fuel cell components

    B. Jiang, P. Muralt, P. Heeb, A. Santis-Alvarez +4 more

    201219 citations Open access

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31. A low-temperature co-fired ceramic micro-reactor system for high-efficiency on-site hydrogen production

    B. Jiang, T. Maeder, A. Santis-Alvarez, D. Poulikakos +1 more

    201518 citations Open access

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32. A nanoparticle bed micro-reactor with high syngas yield for moderate temperature micro-scale SOFC power plants

    A. Santis-Alvarez, M. Nabavi, B. Jiang, T. Maeder +2 more

    201218 citations Open access

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33. Material Parameter Extraction for Complex AlScN Thin Film Using Dual Mode Resonators in Combination with Advanced Microstructural Analysis and Finite Element Modeling

    F. Parsapour, V. Pashchenko, N. Kurz, C. Sandu +4 more

    2019Advanced Electronic Materials17 citations Open access

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34. Effect of AlN seed layer on crystallographic characterization of piezoelectric AlN

    K. Howell, Waqas Bashir, A. De Pastina, R. Matloub +2 more

    2018Journal of Vacuum Science and Technology17 citations Open access

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35. Probing-models for interdigitated electrode systems with ferroelectric thin films

    Cuong H. Nguyen, R. Nigon, T. M. Raeder, U. Hanke +2 more

    201817 citations Open access

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36. Which is the best thin film piezoelectric material?

    P. Muralt

    2017IUS17 citations Open access

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37. Micro-solid state energy conversion membranes: influence of doping and strain on oxygen ion transport and near order for electrolytes

    Ya-Nuo Shi, I. Garbayo, P. Muralt, J. Rupp

    201716 citations Open access

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38. Optimization of Resonant PZT MEMS Mirrors by Inverse Design and Electrode Segmentation

    Adrien Piot, J. Pribošek, Jordan Maufay, J. Schicker +4 more

    2021Journal of microelectromechanical systems15 citations Open access

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39. Fabrication of complex oxide microstructures by combinatorial chemical beam vapour deposition through stencil masks

    E. Wagner, C. Sandu, S. Harada, G. Benvenuti +2 more

    201515 citations Open access

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40. When nothing is constant but change: Adaptive and sensorial materials and their impact on product design

    D. Lehmhus, J. Brugger, P. Muralt, S. Pan'e +4 more

    201315 citations Open access

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41. Free standing and solidly mounted Lamb wave resonators based on Al0.85Sc0.15N thin film

    F. Parsapour, V. Pashchenko, Hugo Chambon, P. Nicolay +3 more

    2019Applied Physics Letters13 citations Open access

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42. Syngas generation from n-butane with an integrated MEMS assembly for gas processing in micro-solid oxide fuel cell systems.

    A. Bieberle-Hutter, A. Santis-Alvarez, Bo Jiang, P. Heeb +8 more

    2012Lab on a Chip12 citations Open access

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43. Combinatorial Chemical Beam Epitaxy of Lithium Niobate Thin Films on Sapphire

    A. Dabirian, S. Harada, Y. Kuzminykh, S. C. Sandu +6 more

    201112 citations Open access

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44. Fabrication, Characterization, and Simulation of Glass Devices with AlN Thin-Film Transducers for Excitation of Ultrasound Resonances

    Andrea Steckel, H. Bruus, P. Muralt, R. Matloub

    2020Physical Review Applied11 citations Open access

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45. Non-destructive piezoelectric characterisation of Sc doped aluminium nitride thin films at wafer level

    S. Mertin, Clemens Nyffeler, T. Makkonen, B. Heinz +5 more

    2019IUS10 citations Open access

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46. Meso-scale ceramic hotplates - A playground for high temperature microsystems

    B. Jiang, P. Muralt, T. Maeder

    201510 citations Open access

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47. Dynamic and long-time tests of the transverse piezoelectric coefficient in PZT thin films

    A. Mazzalai, D. Balma, N. Chidambaram, P. Muralt +1 more

    20142014 Joint IEEE International Symposium on the Applications of Ferroelectric, International Workshop on Acoustic Transduction Materials and Devices & Workshop on Piezoresponse Force Microscopy10 citations

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48. Effective SAW excitation on non-piezoelectric substrate using AlScN piezoelectric thin film BAW/SAW hybrid transducer

    V. Pashchenko, F. Parsapour, S. Ballandras, Ken Haffner +1 more

    2017IUS9 citations Open access

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49. Lamination of LTCC at low pressure and moderate temperature using screen-printed adhesives

    T. Maeder, B. Jiang, Fabrizio Vecchio, Caroline Jacq +2 more

    20129 citations Open access

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50. A concept of wireless and passive very-high temperature sensor

    P. Nicolay, R. Matloub, J. Bardong, A. Mazzalai +1 more

    20178 citations Open access

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