M. Maeda

Most-cited papers

1. Analysis of a highly sensitive silicon gyroscope with cantilever beam as vibrating mass

   K. Maenaka, T. Fujita, Y. Konishi, M. Maeda

   199697 citations

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2. Disk-shaped bulk micromachined gyroscope with vacuum sealing

   T. Fujita, K. Maenaka, T. Mizuno, T. Matsuoka +3 more

   200029 citations

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3. Analysis And Design Concept Of Highly Sensitive Silicon Gyroscope

   K. Maenaka, Y. Konishi, T. Fujita, M. Maeda

   1995International Conference on Solid-State Sensors, Actuators and Microsystems23 citations

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4. A Position-Sensitive MOS Device Using Lateral Photovoltaic Effect

   H. Niu, Chihiro Aoki, T. Matsuda, M. Takai +1 more

   198715 citations

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5. Two-dimensional micromachined gyroscope

   T. Fujita, T. Mizuno, R. Kenny, K. Maenaka +1 more

   1997International Conference on Solid-State Sensors, Actuators and Microsystems13 citations

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6. Design of two-dimensional micromachined gyroscope by using nickel electroplating

   T. Fujita, K. Maenaka, M. Maeda

   19986 citations

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7. Study of Ni-W alloy as a MEMS Material

   H. Ikeda, S. Ioku, T. Fujita, K. Maenaka +1 more

   19995 citations Open access

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8. Design Problems on Vibratory Micro-Gyroscopes

   K. Maenaka, T. Fujita, M. Maeda

   19984 citations Open access

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9. Preliminary study on rotational vibrating disk gyroscope

   T. Fujita, K. Hatano, T. Mizuno, K. Maenaka +1 more

   19992 citations Open access

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10. Characteristics of Vertical Hall Cells and Improvement of Their Sensitivity

    K. Maenaka, Tatsuro Ogusu, H. Fujita, M. Maeda

    19972 citations Open access

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11. Fill-Factor Calculation of Solar Cells Affected by Sheet Resistance of Surface Layer

    H. Niu, H. Doi, T. Matsuda, M. Maeda

    19872 citations Open access

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12. Micromachined Mirror using High Polymer as Moving Structure

    K. Maenaka, T. Nishimura, H. Ikeda, T. Fujita +1 more

    20001 citations Open access

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13. A Study of Angular Rate Sensing by Acceleration Sensors

    K. Maenaka, M. Maeda

    19981 citations Open access

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14. Oxidation of Si by Microwave-Excited Oxygen-Plasma through Protective Al Coating

    T. Matsuda, H. Niu, M. Maeda, M. Takai

    19861 citations

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15. A Study of Vibratory Gyroscope using Membrane Structure as A Spring

    K. Maenaka, S. Okada, Masato Tokunaga, T. Fujita +1 more

    20000 citations Open access

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16. Driving Technique of Reference Vibration for Vibratory Gyroscopes using Hard Spring Effect

    T. Fujita, S. Okada, K. Maenaka, M. Maeda

    20000 citations Open access

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17. Analog Integrated Circuit for Micro-Gyro Interface Realized by Multi-chip Service in Japan

    K. Maenaka, T. Fujita, Kazuto Okamoto, M. Maeda

    19980 citations Open access

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18. Design of an integrated circuit using the print-circuit boards CAD

    T. Muraoka, Kazuto Okamoto, R. Kenny, K. Maenaka +1 more

    19970 citations

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19. Electrical Control of Resonance Frequency for Piezo Bimorph

    T. Fujita, T. Mizuno, K. Maenaka, M. Maeda

    19970 citations Open access

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20. Oxidation of Al/Si by microwave excited O2+N2 mixture plasma.

    T. Matsuda, H. Niu, M. Maeda, M. Takai +1 more

    19860 citations Open access

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