M. Tuckermann

Most-cited papers

1. DOAS-observation of halogen radical-catalysed arctic boundary layer ozone destruction during the ARCTOC-campaigns 1995 and 1996 in Ny-Ålesund, Spitsbergen

   M. Tuckermann, R. Ackermann, C. Gölz, H. Lorenzen-Schmidt +5 more

   1997185 citations Open access

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2. Dexamethasone Arterializes Venous Endothelial Cells by Inducing Mitogen-activated Protein Kinase Phosphatase-1 a Novel Antiinflammatory Treatment for Vein Grafts? Clinical Perspective on P 532 Methods Reagents and Antibodies Ecs and Exposure to Flow Silencing of Mkp-1 Transient Transfection Comparat

   M. Zakkar, Anh Le, H. Luong, O. Chaudhury +157 more

   29 citations

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3. Stress measurements on chrome-tanned leather

   M. Tuckermann, M. Mertig, W. Pompe, G. Reich

   200112 citations

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4. SPC based in-line reticle monitoring on product wafers

   K. Mai, M. Tuckermann

   2005IEEE/SEMI Conference and Workshop on Advanced Semiconductor Manufacturing 2005.11 citations

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5. Developing micro ADI methodology for new litho process monitoring strategies

   Iris Mäge, U. Seifert, B. Saville, M. Tuckermann

   2007SPIE Advanced Lithography6 citations

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6. In situ observation of moisture-induced swelling of leather in an environmental scanning electron microscope

   M. Tuckermann, M. Mertig, W. Pompe

   20016 citations

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7. Defect learning with 193-nm resists

   I. Mäge, B. Pinter, M. Tuckermann, Oreste Donzella

   2004SPIE Advanced Lithography5 citations

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8. Development and implementation of PWQ on patterned wafer darkfield inspection systems

   U. Streller, K. Wendt, A. Wehner, Jens Goeckeritz +4 more

   2009Advanced Lithography3 citations

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9. Monitoring yield-critical defects

   U. Streller, C. Mata, M. Tuckermann

   20060 citations

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10. Measuring device for characterizing mechanical stress states in planar materials

    M. Mertig, W. Pompe, M. Tuckermann

    20000 citations

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11. A method for the characterization of the mechanical stress states in planar materials and apparatus for performing the method

    A. Gerbatsch, S. Lampenscherf, M. Mertig, W. Pompe +2 more

    19980 citations

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