Chienliu Chang

Most-cited papers

1. Flexible Temperature Sensor Array Based on a Graphite-Polydimethylsiloxane Composite

   Wen-Pin Shih, L.-C. Tsao, Chian-Wen Lee, Ming-Yuan Cheng +3 more

   2010Italian National Conference on Sensors210 citations Open access

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2. Etching submicrometer trenches by using the Bosch process and its application to the fabrication of antireflection structures

   Chienliu Chang, Yeong-Feng Wang, Y. Kanamori, J. Shih +4 more

   2005153 citations Open access

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3. Innovative micromachined microwave switch with very low insertion loss

   Chienliu Chang, P. Chang

   200085 citations

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4. Trench filling characteristics of low stress TEOS/ozone oxide deposited by PECVD and SACVD

   Chienliu Chang, T. Abe, M. Esashi

   200463 citations

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5. Capacitive Micro Pressure Sensor Integrated with a Ring Oscillator Circuit on Chip

   Ching-Liang Dai, Po-Wei Lu, Chienliu Chang, Chengzhang Liu

   2009Italian National Conference on Sensors54 citations Open access

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6. A piezodriven XY-microstage for multiprobe nanorecording

   Deyuan Zhang, Chienliu Chang, T. Ono, M. Esashi

   200351 citations

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7. Wet etching rates of InGaZnO for the fabrication of transparent thin-film transistors on plastic substrates

   Chi-Yuan Lee, Chienliu Chang, Wen-Pin Shih, Ching-Liang Dai

   201043 citations Open access

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8. Acoustic lens for capacitive micromachined ultrasonic transducers

   Chienliu Chang, K. Firouzi, Kwan Kyu Park, A. F. Sarioglu +5 more

   201433 citations

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9. Fabrication of a micromachined optical modulator using the CMOS process

   Hung-Lin Chen, Kaihsiang Yen, Huiwen Huang, Jinhung Chio +3 more

   2000SPIE Photonics Taiwan28 citations Open access

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10. Ex-vivo HIFU experiments using a 32 × 32-element CMUT array

    Hyo-Seon Yoon, Chienliu Chang, Ji-Hoon Jang, Anshuman Bhuyan +6 more

    2016IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control24 citations Open access

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11. Capsule ultrasound device: Characterization and testing results

    Junyi Wang, Farah Memon, Gerard Touma, Spyridon Baltsavias +7 more

    2017IUS21 citations

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12. Capsule ultrasound device: Further developments

    Farah Memon, Gerard Touma, Junyi Wang, Spyridon Baltsavias +9 more

    2016IUS21 citations

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13. An integrated Ring CMUT array for endoscopic ultrasound and photoacoustic imaging

    A. Nikoozadeh, Chienliu Chang, J. Choe, Anshuman Bhuyan +3 more

    2013IUS21 citations

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14. Fabrication of Wireless Micro Pressure Sensor Using the CMOS Process

    Ching-Liang Dai, Po-Wei Lu, Chyan-Chyi Wu, Chienliu Chang

    2009Italian National Conference on Sensors20 citations Open access

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15. Dual-mode integrated circuit for imaging and HIFU with 2-D CMUT arrays

    Ji-Hoon Jang, M. Rasmussen, Anshuman Bhuyan, Hyo-Seon Yoon +9 more

    2015IUS16 citations

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16. A 32×32 integrated CMUT array for volumetric ultrasound imaging

    Anshuman Bhuyan, Chienliu Chang, J. Choe, Byung Chul Lee +3 more

    2013IUS14 citations

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17. Capsule ultrasound device

    Farah Memon, Gerard Touma, Junyi Wang, Spyridon Baltsavias +9 more

    2015IUS12 citations

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18. Fully integrated 2D CMUT ring arrays for endoscopic ultrasound

    Azadeh Moini, A. Nikoozadeh, J. Choe, Chienliu Chang +3 more

    2016IUS10 citations

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19. A wideband electrostatic microwave switch fabricated by surface micromachining

    Chienliu Chang, Ching-Liang Dai, Jenn-Yi Chen, Hongling Chen +3 more

    20009 citations

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20. Integration of a dual-mode catheter for ultrasound image guidance and HIFU ablation using a 2-D CMUT array

    Ji-Hoon Jang, Chienliu Chang, M. Rasmussen, Azadeh Moini +4 more

    2017IUS8 citations

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21. Multi-parameter optimization of vented CMUTs for airborne applications

    Bo Ma, Chienliu Chang, H. Oğuz, K. Firouzi +2 more

    2017IUS7 citations

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22. Singulation for imaging ring arrays of capacitive micromachined ultrasonic transducers

    Chienliu Chang, Azadeh Moini, A. Nikoozadeh, A. F. Sarioglu +3 more

    2014Journal of Micromechanics and Microengineering7 citations Open access

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23. Combustor-integrated micro-fuel processor with suspended membrane structure

    K. Chang, Shuji Tanaka, Chienliu Chang, M. Esashi

    2003TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664)6 citations

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24. Fabrication of the planar angular rotator using the CMOS process

    Hung-Lin Chen, Chienliu Chang, Kaihsiang Yen, Huiwen Huang +3 more

    2000Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308)6 citations Open access

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25. High-aspect-ratio fine-line metallization

    Chienliu Chang, P. Chang, Kaihsiang Yen, Shey-Shi Lu

    1998Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components6 citations

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26. Fabrication, Packaging, and Catheter Assembly of 2D CMUT Arrays for Endoscopic Ultrasound and Cardiac Imaging

    Azadeh Moini, A. Nikoozadeh, J. Choe, B. Khuri-Yakub +4 more

    20155 citations

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27. Glass Etching Assisted by Femtosecond Pulse Modification

    Chienliu Chang, T. Abe, M. Esashi

    20034 citations

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28. Capacitive micro pressure sensors with underneath readout circuit using a standard CMOS process

    Ching-Liang Dai, Shih-Chen Chang, Chi-Yuan Lee, Ying-Chou Cheng +3 more

    20033 citations

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29. Wideband microwave switch by micromachining techniques

    Chienliu Chang, P. Chang, Kaihsiang Yen, Shey-Shi Lu

    1998Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components3 citations

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30. Dual-mode capacitive micromachined ultrasonic transducer arrays for high intensity focused ultrasound and imaging

    Ji-Hoon Jang, Chienliu Chang, Morten F. Rasumssen, Kevin Brenner +3 more

    2018Journal of the Acoustical Society of America2 citations

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31. Fabrication of micro-sensors based on a parylene thin-film substrate for monitoring proton exchange membrane fuel cells

    Chi-Yuan Lee, Chienliu Chang, Pin-Cheng Chan, Ren-De Huang +1 more

    2010IEEE International Conference on Nano/Micro Engineered and Molecular Systems2 citations

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32. Applied electrostatic parallelogram actuators for microwave switches by standard CMOS process

    Kaihsiang Yen, Chienliu Chang, P. Chang, Jinghung Chiou +2 more

    1999Design, Test, Integration, and Packaging of MEMS/MOEMS2 citations

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33. Microelectrode array: a new method for the design of electrostatic microactuators and capacitive microsensors

    Chienliu Chang, P. Chang, Ruey-shing Huang, Chin-Piao Chang +1 more

    1997Smart Materials, Nano-, and Micro- Smart Systems2 citations

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34. Capsule ultrasound device: Characterization and testing results

    Junyi Wang, Farah Memon, Gerard Touma, Spyridon Baltsavias +7 more

    2017IUS1 citations

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35. Flexible micro-sensors on stainless steel foil for monitoring proton exchange membrane fuel cells

    Chi-Yuan Lee, Chienliu Chang, Wei-Jung Hsieh, Wei-Yuan Fan +2 more

    2010IEEE International Conference on Nano/Micro Engineered and Molecular Systems1 citations

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36. Design and experiment of microelectrode arrays for deformable membrane mirror

    Chienliu Chang, P. Chang, Kaihsiang Yen

    1998Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components1 citations

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37. Ultrasonic capsule endoscopy device having image -based relative motion estimation

    Farah Memon, Junyi Wang, Gerard Touma, Spyridon Baltsavias +9 more

    20180 citations

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38. HIFUアブレーションと画像誘導のための経皮的心臓カテーテルの統合【Powered by NICT】 | 文献情報 | J-GLOBAL 科学技術総合リンクセンター

    Ji-hoon Jang, Chienliu Chang, R. Fischer, Moini Azadeh +8 more

    20170 citations

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39. Notice of Removal: Integration of percutaneous cardiac catheter for HIFU ablation and image guidance

    Ji-Hoon Jang, Chienliu Chang, M. Rasmussen, Azadeh Moini +8 more

    20170 citations

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40. Multiparameter optimization of vented CMUTs for airborne applications

    Bo Ma, Chienliu Chang, H. Oğuz, K. Firouzi +1 more

    2017IUS0 citations

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41. Fabrication of flexible micro flow sensor for use in micro reformer

    Chi-Yuan Lee, Chienliu Chang, Chi-Chung Chang, Yu-Ming Chang

    2010IEEE International Conference on Nano/Micro Engineered and Molecular Systems0 citations

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42. NANO-MACHINING TECHNIQUE ON QUARTZ AND ITS APPLICATION TO NANOIMPRINT LITHOGRAPHY

    Ying-Chun Lee, J. Shieh, Chienliu Chang

    20050 citations

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43. Fabrication of the planar angular rotator using the CMOS process

    Ching-Liang Dai, Chienliu Chang, Hung-Lin Chen, P. Chang

    20020 citations Open access

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44. Fabrication of diffractive optical elements using the CMOS process

    Hung-Lin Chen, Huiwen Huang, Kaihsiang Yen, Jinhung Chio +3 more

    2000SPIE Photonics Taiwan0 citations Open access

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45. Integrated eyeball-tracking device

    Hung-Lin Chen, Kaihsiang Yen, Jinhung Chio, Huiwen Huang +3 more

    2000SPIE Photonics Taiwan0 citations

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46. Design of Microelectrode Arrays for Electrostatic Microactuators and Capacitive Microsensors

    P. Chang, Chienliu Chang, Kaihsiang Yen

    19980 citations

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47. Fabrication of micromachined microwave couplers by CMOS process

    Chienliu Chang, J. Chio, Kaihsiang Yen, P. Chang +1 more

    1998Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components0 citations

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48. Abstract—real-time 3d Volumetric Ultrasound Imaging

    Anshuman Bhuyan, Chienliu Chang, J. Choe, Byung Chul Lee +3 more

    0 citations

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