Fabrication of pores in a silicon carbide wafer by electrochemical etching with a glassy-carbon needle electrode.
Tomohiko Sugita, Kazuki Hiramatsu, S. Ikeda, M. Matsumura
2013ACS Applied Materials and Interfaces26 citations
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Tomohiko Sugita, Kazuki Hiramatsu, S. Ikeda, M. Matsumura
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