Effect of plasma power on properties of hydrogenated amorphous silicon carbide hardmask films deposited by PECVD
Sung-yeol Kwon, Yoonsoo Park, W. Ban, Chulmin Youn +4 more
Researcher profile · Semantic Scholar
Sung-yeol Kwon, Yoonsoo Park, W. Ban, Chulmin Youn +4 more
Hyuna Lim, Jae Hoon Chung, Yoonsoo Park, Namwuk Baek +5 more
Sung-yeol Kwon, W. Ban, Hoonbae Kim, Yoonsoo Park +3 more
Hyuna Lim, Yoonsoo Park, Youngsik Seo, Heonyong Park +2 more
C. Seo, Namwuk Baek, Yoonsoo Park, Hyuna Lim +4 more
Namwuk Baek, Yoonsoo Park, Hyuna Lim, Jihwan Cha +4 more
Hyuna Lim, Yoonsoo Park, Sujeong Jang, Heonyong Park +2 more
Sung-yeol Kwon, Yoonsoo Park, W. Ban, Younghyun Kim +2 more
Yoonsoo Park, Hyuna Lim, Namwuk Baek, S. Park +3 more
Hyuna Lim, Yoonsoo Park, Namwuk Baek, So-Yeon Jun +4 more
Yoonsoo Park, Hyuna Lim, Sung-yeol Kwon, Younghyun Kim +2 more
Yoonsoo Park, Sung-yeol Kwon, W. Ban, Hyuna Lim +1 more