Research on ion implantation in MEMS device fabrication by theory, simulation and experiments
Min-Yu Bai, Yulong Zhao, Bin-Bin Jiao, Lingjian Zhu +2 more
2018International Journal of Modern Physics B26 citations
Semantic Scholar
Researcher profile · Semantic Scholar
Min-Yu Bai, Yulong Zhao, Bin-Bin Jiao, Lingjian Zhu +2 more