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A. Y. Kovalgin · SciRah

Researcher profile · Semantic Scholar

A. Y. Kovalgin

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A. Y. Kovalgin — researcher profile on SciRah

h-index: 13
Works: 113
Citations: 580

Most-cited papers

Systematic TLM Measurements of NiSi and PtSi Specific Contact Resistance to n- and p-Type Si in a Broad Doping Range
N. Stavitski, M. V. van Dal, A. Lauwers, C. Vrancken +2 more
2008IEEE Electron Device Letters83 citations Open access
Semantic Scholar
Growth Kinetics and Oxidation Mechanism of ALD TiN Thin Films Monitored by In Situ Spectroscopic Ellipsometry
H. Van Bui, A. Groenland, A. A. I. Aarnink, R. Wolters +2 more
201167 citations Open access
Semantic Scholar
On the difference between optically and electrically determined resistivity of ultra-thin titanium nitride films
H. Van Bui, A. Y. Kovalgin, R. Wolters
201353 citations
Semantic Scholar
Self-limiting growth and thickness- and temperature-dependence of optical constants of ALD AlN thin films
H. Van Bui, M. Nguyen, F. B. Wiggers, A. A. I. Aarnink +2 more
201439 citations Open access
Semantic Scholar
Optical and Electrical Characterization of SiO2 films deposited at low temperature by means of remote ICPECVD
A. Boogaard, A. Y. Kovalgin, I. Brunets, J. Holleman +1 more
200728 citations
Semantic Scholar
Interaction of epitaxial silicene with overlayers formed by exposure to Al atoms and O2 molecules.
R. Friedlein, H. Van Bui, F. B. Wiggers, Y. Yamada-Takamura +2 more
2014Journal of Chemical Physics22 citations
Semantic Scholar
Specific contact resistance measurements of metal-semiconductor junctions
N. Stavitski, M. V. van Dal, R. Wolters, A. Y. Kovalgin +1 more
20052006 IEEE International Conference on Microelectronic Test Structures22 citations Open access
Semantic Scholar
PEALD AlN: controlling growth and film crystallinity
Souri Banerjee, A. A. I. Aarnink, R. V. D. van de Kruijs, A. Y. Kovalgin +1 more
201521 citations Open access
Semantic Scholar
Replication molds having nanometer-scale shape control fabricated by means of oxidation and etching.
G. Kim, A. Y. Kovalgin, J. Holleman, J. Brugger
2002Journal of Nanoscience and Nanotechnology20 citations Open access
Semantic Scholar
Low-temperature deposition of high-quality silicon oxynitride films for CMOS-integrated optics.
B. Rangarajan, A. Y. Kovalgin, K. Worhoff, Jurriaan Schmitz
2013Optics Letters17 citations Open access
Semantic Scholar
Comparison of tungsten films grown by CVD and hot-wire assisted atomic layer deposition in a cold-wall reactor
Mengdi Yang, A. A. I. Aarnink, A. Y. Kovalgin, D. Gravesteijn +2 more
201616 citations Open access
Semantic Scholar
Growth of Sub-Nanometer Thin Continuous TiN Films by Atomic Layer Deposition
H. Van Bui, A. Y. Kovalgin, R. Wolters
201216 citations Open access
Semantic Scholar
Chemical modeling of a high-density inductively-coupled plasma reactor containing silane
A. Y. Kovalgin, A. Boogaard, I. Brunets, J. Holleman +1 more
200716 citations
Semantic Scholar
Net negative charge in low-temperature SiO2 gate dielectric layers
A. Boogaard, A. Y. Kovalgin, R. Wolters
200913 citations
Semantic Scholar
Low-temperature LPCVD of Si nanocrystals from disilane and trisilane (Silcore®) embedded in ALD-alumina for non-volatile memory devices
I. Brunets, A. A. I. Aarnink, A. Boogaard, A. Y. Kovalgin +3 more
200713 citations
Semantic Scholar
Above-CMOS a-Si and CIGS solar cells for powering autonomous microsystems
J. Lu, W.-B. Liu, C. V. D. van der Werf, A. Y. Kovalgin +3 more
2010International Electron Devices Meeting10 citations Open access
Semantic Scholar
On the feasibility of silicene encapsulation by AlN deposited using an atomic layer deposition process.
H. Van Bui, F. B. Wiggers, R. Friedlein, Y. Yamada-Takamura +2 more
2015Journal of Chemical Physics9 citations Open access
Semantic Scholar
Thermal and plasma-enhanced oxidation of ALD TiN
A. Groenland, I. Brunets, A. Boogaard, A. A. I. Aarnink +2 more
20087 citations
Semantic Scholar
Cross-bidge Kelvin resistor (CBKR) structures for measurement of low contact resistances
N. Stavitski, J. Klootwijk, H. V. van Zeijl, B. Boksteen +2 more
20077 citations
Semantic Scholar
Low-Stress Highly-Conductive In-Situ Boron Doped Ge0.7Si0.3 Films by LPCVD
S. Kazmi, A. Y. Kovalgin, A. A. I. Aarnink, C. Salm +1 more
20126 citations Open access
Semantic Scholar
Measurement of electron temperatures of Argon Plasmas in a High-Density Inductively-Coupled Remote Plasma System by Langmuir Probe and Optical-Emission Spectroscopy
A. Boogaard, A. Y. Kovalgin, A. A. I. Aarnink, R. Wolters +3 more
20066 citations
Semantic Scholar
Low-power, antifuse-based silicon chemical sensor on a suspended membrane
A. Y. Kovalgin, J. Holleman, G. Iordache, T. Jenneboer +3 more
20066 citations Open access
Semantic Scholar
The impact of deuterated CMOS processing on gate oxide reliability
A. Hof, E. Hoekstra, A. Y. Kovalgin, R. V. Van Schaijk +2 more
2005IEEE Transactions on Electron Devices6 citations
Semantic Scholar
A study of cross-bridge kelvin resistor structures for reliable measurement of low contact resistances
N. Stavitski, J. Klootwijk, H. V. van Zeijl, A. Y. Kovalgin +1 more
20082008 IEEE International Conference on Microelectronic Test Structures5 citations Open access
Semantic Scholar
Four point probe structures with buried electrodes for the electrical characterization of ultrathin conducting films
A. Groenland, R. Wolters, A. Y. Kovalgin, Jurriaan Schmitz
20092009 IEEE International Conference on Microelectronic Test Structures4 citations Open access
Semantic Scholar
Laterally confined large-grained Poly-GeSi films: Crystallization and dopant activation using green laser
B. Rangarajan, A. Y. Kovalgin, P. Oesterlin, R. de Kloe +2 more
20123 citations Open access
Semantic Scholar
A difference in using atomic layer deposition or physical vapour deposition TiN as electrode material in metal-insulator-metal and metal-insulator-silicon capacitors.
A. Groenland, R. Wolters, A. Y. Kovalgin, Jurriaan Schmitz
2011Journal of Nanoscience and Nanotechnology3 citations
Semantic Scholar
On the Oxidation Kinetics of Silicon in Ultradiluted H2O and D2O Ambient
A. Hof, A. Y. Kovalgin, P. Woerlee, J. Schmitz
20053 citations Open access
Semantic Scholar
Room Temperature SiO2 Films Deposited by Multipolar ECR PECVD
G. Isai, A. Y. Kovalgin, J. Holleman, P. Woerlee +1 more
20013 citations
Semantic Scholar
An approach to characterize ultra-thin conducting films protected against native oxidation by an in-situ capping layer
H. Van Bui, F. B. Wiggers, M. D. de Jong, A. Y. Kovalgin
2014International Conference on Microelectronic Test Structures2 citations
Semantic Scholar
Nanoscale carrier injectors for high luminescence Si-based LEDs
G. Piccolo, A. Y. Kovalgin, J. Schmitz
20122 citations
Semantic Scholar
Increased light emission by geometrical changes in Si LEDs
V. Puliyankot, G. Piccolo, R. Hueting, A. Heringa +2 more
20118th IEEE International Conference on Group IV Photonics2 citations
Semantic Scholar
Light emission enhancement by geometrical scaling of carrier injectors in Si-based LEDs
G. Piccolo, V. Puliyankot, A. Y. Kovalgin, R. Hueting +2 more
2011European Solid-State Device Research Conference2 citations
Semantic Scholar
Materials Characterization of CIGS solar cells on Top of CMOS chips
Jinglian Lu, W.-B. Liu, A. Y. Kovalgin, Yong Sun +4 more
20112 citations Open access
Semantic Scholar
A study of thermal oxidation and plasma-enhanced oxidation/reduction of ALD TiN layers
I. Brunets, A. Groenland, A. Boogaard, A. A. I. Aarnink +1 more
20082 citations
Semantic Scholar
Cross-Bridge Kelvin Resistor (CBKR) structures for silicide-semiconductor junctions characterization
N. Stavitski, M. V. van Dal, J. Klootwijk, R. Wolters +2 more
20062 citations
Semantic Scholar
Silicide-to-silicon specific contact resistance characterization. Test structures and models
J. Schmitz, R. Wolters, A. Y. Kovalgin, N. Stavitski
20052 citations
Semantic Scholar
A micro-scale hot-surface device based on non-radiative carrier recombination [gas sensor example application]
A. Y. Kovalgin, J. Holleman, G. Iordache
2004Proceedings of the 30th European Solid-State Circuits Conference (IEEE Cat. No.04EX850)2 citations Open access
Semantic Scholar
Gate oxide reliability and deuterated CMOS processing
A. Hof, A. Y. Kovalgin, R. V. Van Schaijk, W. Baks +1 more
2004IEEE International Integrated Reliability Workshop Final Report2 citations Open access
Semantic Scholar
A novel approach to low-power hot-surface devices with decoupled electrical and thermal resistances
A. Y. Kovalgin, J. Holleman, A. V. D. van den Berg
20022 citations
Semantic Scholar
On the Feasibility of Using Antifuses as Low-Power Heating / Detecting Elements in Pellistor-Type Gas Sensors
A. Y. Kovalgin, J. Holleman, A. V. D. van den Berg
20012 citations
Semantic Scholar
Characterisation of Silicon Oxide films deposited by means of ECR PECVD
A. Y. Kovalgin, I. Isai, J. Holleman, R. Dekker +2 more
19992 citations
Semantic Scholar
TiN films by Atomic Layer Deposition: Growth and electrical characterization down to sub-nm thickness
H. Van Bui, R. Wolters, A. Y. Kovalgin
20121 citations
Semantic Scholar
On the leakage problem of MIM capacitors due to improper etching of titanium nitride
A. Groenland, R. Wolters, A. Y. Kovalgin, J. Schmitz
20101 citations
Semantic Scholar
Influence of passivation process on chip performance
J. Lu, A. Y. Kovalgin, J. Schmitz
20091 citations
Semantic Scholar
Contact chain measurements for ultrathin conducting films
A. Groenland, R. Wolters, A. Y. Kovalgin, J. Schmitz
20091 citations
Semantic Scholar
Effect of carrier injector size on silicon LED performance
G. Piccolo, A. Y. Kovalgin, J. Schmitz
20091 citations
Semantic Scholar
Low-temperature process steps for realization of non-volatile memory devices
I. Brunets, A. Boogaard, A. A. I. Aarnink, A. Y. Kovalgin +3 more
20071 citations
Semantic Scholar
Simulation of a Nanolink Hot-Plate Device
A. Groenland, A. Y. Kovalgin, J. Holleman, J. Schmitz
20071 citations
Semantic Scholar
Memory devices with encapsulated Si nano-crystals: Realization and Characterization.
I. Brunets, T. van Hemert, A. Boogaard, A. A. I. Aarnink +3 more
20061 citations
Semantic Scholar

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J. Holleman×14
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