Introduction

Precision motion control is strongly required in many fields, such as precision engineering, micromanufacturing, biotechnology, and nanotechnology. Although there have been tremendous technological advancements in the field of control engineering, it is still challenging to fulfill the desired performance for precision motion control systems. Nowadays, there is an increasing trend to apply optimization approaches in precision engineering to obtain the control system parameters. In this work, we present a result of several years of work in the area of optimization in motion control systems, including model-based optimization approaches and data-based optimization approaches for control system parameter design. Some industrial applications are served as examples to illustrate the use of proposed methodology, the validation is conducted on the actual systems and the results are verified experimentally.