conference paper Open access
Implementation of Trusted Manufacturing & AI-based process optimization into microelectronic manufacturing research environments
Tanja Braun, Michael Erdmann, Peter Fruehauf, Rene Blank, Jakub Pawlikowski, Karl-Friedrich Becker, Bernd Schröder, Stefan Nerreter, Matthias Heimann, Salar Mehrafsun, Marc ; https://orcid.org/ Hesse, Stefan Gottwald, Eugen Beck, Christian Voigt, Ralf Fust, Martin Schneider-Ramelow, Andreas Hofmeister, Steve Voges, Michael Thies
2021-01-01 0 citations
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Abstract
Becker K-F, Voges S, Fruehauf P, et al. Implementation of Trusted Manufacturing & AI-based process optimization into microelectronic manufacturing research environments. In: Proceedings of the 54th IMAPS International Symposium on Microelectronics. 2021